MLchartDataset catalogue

Develop

Term · Semiconductors · MLC-T-SEM-000092

A chemical process in photolithography where exposed or unexposed regions of a photoresist layer are selectively removed, revealing the underlying material. For positive resists, the exposed areas are dissolved, while for negative resists, the unexposed areas are removed. This step transfers the pattern from the photomask into the resist layer on the wafer.

Table 1. Record
IdentifierMLC-T-SEM-000092
FieldSemiconductors
SubjectLithography & Patterning
Record as JSON 
{
  "id": "MLC-T-SEM-000092",
  "term": "Develop",
  "field": "Semiconductors",
  "definition": "A chemical process in photolithography where exposed or unexposed regions of a photoresist layer are selectively removed, revealing the underlying material. For positive resists, the exposed areas are dissolved, while for negative resists, the unexposed areas are removed. This step transfers the pattern from the photomask into the resist layer on the wafer.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/develop/"
}

Record 88 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.