MLchartDataset catalogue

Bulk gas

Term · Semiconductors · MLC-T-SEM-000044

A gas supplied in large quantities to a semiconductor fabrication plant from an external source, as opposed to from individual cylinders. It is delivered through a dedicated piping network from large storage tanks or on-site generation plants directly to points of use in the cleanroom. The most common bulk gases are nitrogen, oxygen, argon, and hydrogen, used for purging, creating inert atmospheres, and as process reactants.

Table 1. Record
IdentifierMLC-T-SEM-000044
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000044",
  "term": "Bulk gas",
  "field": "Semiconductors",
  "definition": "A gas supplied in large quantities to a semiconductor fabrication plant from an external source, as opposed to from individual cylinders. It is delivered through a dedicated piping network from large storage tanks or on-site generation plants directly to points of use in the cleanroom. The most common bulk gases are nitrogen, oxygen, argon, and hydrogen, used for purging, creating inert atmospheres, and as process reactants.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/bulk-gas/"
}

Record 36 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.