Substrate processing apparatus

{
  "publication_number": "US10685832B1",
  "country": "US",
  "kind": "B1",
  "title": "Substrate processing apparatus",
  "abstract": "There is provided a technique that includes a metal container including a process chamber configured to process a substrate, a substrate mounting plate rotatably installed in the container and having a plurality of substrate mounting surfaces circumferentially arranged at an upper surface thereof, a heater configured to heat the substrate mounted on each of the plurality of substrate mounting surfaces, a heat attenuator installed between the heater and the container, a gas supply part configured to supply a gas to the process chamber, and a support part configured to rotate the substrate mounting plate.",
  "claims": [
    "1. A substrate processing apparatus, comprising: a metal container including a process chamber configured to process a substrate; a substrate mounting plate rotatably installed in the metal container and having a plurality of substrate mounting surfaces circumferentially arranged at an upper surface of the substrate mounting plate; a heater configured to heat the substrate mounted on each of the plurality of substrate mounting surfaces; a heat attenuator installed between the heater and the metal container; a gas supply part configured to supply a gas to the process chamber; and a support part configured to rotate the substrate mounting plate, and including: a metal core portion configured to fix the substrate mounting plate; and a second cover disposed between the metal core portion and the process chamber, wherein the heat attenuator is installed on the second cover and configured to be adjacent to the metal core portion via a space.",
    "2. The apparatus of claim 1, wherein a heater unit, which is isolated from an atmosphere in the process chamber and constituted with a metal wall, a quartz window and the heater, is installed at a bottom portion of the metal container.",
    "3. The apparatus of claim 2, wherein a metal exhaust structure and a first cover adjacent to the metal exhaust structure are installed at the bottom portion of the metal container.",
    "4. The apparatus of claim 3, wherein the heat attenuator is constituted as a cover coated with fine quartz particles on a surface of the cover.",
    "5. The apparatus of claim 2, wherein the heat attenuator is configured as a cover coated with fine quartz particles on a surface of the cover.",
    "6. The apparatus of claim 1, wherein a metal exhaust structure and a first cover adjacent to the metal exhaust structure are installed at a bottom portion of the metal container.",
    "7. The apparatus of claim 6, wherein the heat attenuator is constituted as a cover coated with fine quartz particles on a surface of the cover.",
    "8. The apparatus of claim 1, wherein the heat attenuator is constituted as a cover coated with fine quartz particles on a surface of the cover."
  ],
  "cpc": [
    "H10P 14/6334",
    "C23C 16/345",
    "C23C 16/4401",
    "C23C 16/45517",
    "C23C 16/45527",
    "C23C 16/45551",
    "C23C 16/45553",
    "C23C 16/4584",
    "C23C 16/4585",
    "C23C 16/4586",
    "C23C 16/46",
    "H01L 21/02123",
    "H01L 21/02208",
    "H01L 21/02271",
    "H01L 21/67754",
    "H10P 14/6512",
    "H10P 14/6681",
    "H10P 14/6903",
    "H10P 72/0402",
    "H10P 72/0431",
    "H10P 72/0432",
    "H10P 72/0434",
    "H10P 72/3311",
    "H10P 72/7618",
    "H10P 72/7621",
    "H10P 72/7624",
    "H10P 95/90"
  ],
  "assignees": [
    "KOKUSAI ELECTRIC CORP"
  ],
  "filing_date": "2019-08-30",
  "publication_date": "2020-06-16",
  "grant_date": "2020-06-16",
  "priority_date": "2019-03-12",
  "application_number": "US-201916557442-A",
  "family_id": "71075225",
  "citations": [
    "JP2013084898A",
    "US2013078823A1",
    "US2016032457A1",
    "US2016379868A1",
    "US2018374672A1"
  ]
}