Communication method, transport system, and communication device

{
  "publication_number": "US12198957B2",
  "country": "US",
  "kind": "B2",
  "title": "Communication method, transport system, and communication device",
  "abstract": "A communication method of a transport system including of transport carriages each transporting a transported object, and communication devices connected one-to-one with loading ports onto which the transported objects are loaded. The communication devices are communicably connected to each other in advance. The communication method includes transmitting, from a specific transport carriage to the communication devices, a first signal having a specific communication as a final transmission destination, and receiving, in the specific communication device, the first signal from the specific transport carriage through a communication channel that passes through another communication device. The first signal is a signal communicated for the specific transport carriage to transfer the transported object to and from a specific loading port connected one-to-one with the specific communication device.",
  "claims": [
    "1. A communication method of a transport system, the transport system including a plurality of transport carriages, each transporting a transported object, and a plurality of communication devices connected one-to-one with corresponding ones of a plurality of equipment onto which the transported objects are loaded, the plurality of communication devices being communicably connected to each other in advance, the communication method comprising: (a) transmitting, from a specific transport carriage among the plurality of transport carriages to the plurality of communication devices, a first signal having a specific communication device among the plurality of communication devices as a final transmission destination; and (b) receiving, in the specific communication device, the first signal from the specific transport carriage through a communication channel that passes through at least one other communication device among the plurality of communication devices; wherein the first signal is a signal communicated for the specific transport carriage to transfer the transported object to and from a specific one of the equipment which is connected one-to-one with the specific communication device; the plurality of communication devices includes at least three communication devices; the first signal includes time information identifying a time for each of the at least one other communication device to transmit the first signal to the specific communication device; and in (b), each of the at least one other communication device transmits the first signal to the specific communication device at the time identified by the time information.",
    "2. The communication method according to claim 1, wherein the plurality of communication devices are connected to each other by a hardwire cable.",
    "3. A communication method of a transport system, the transport system including a plurality of transport carriages, each transporting a transported object, and a plurality of communication devices connected one-to-one with corresponding ones of a plurality of equipment onto which the transported objects are loaded, the plurality of communication devices being communicably connected to each other in advance, the communication method comprising: (a) transmitting, from a specific transport carriage among the plurality of transport carriages to the plurality of communication devices, a first signal having a specific communication device among the plurality of communication devices as a final transmission destination; and (b) receiving, in the specific communication device, the first signal from the specific transport carriage through a communication channel that passes through at least one other communication device among the plurality of communication devices: wherein the first signal is a signal communicated for the specific transport carriage to transfer the transported object to and from a specific one of the equipment which is connected one-to-one with the specific communication device; in (b), each of the at least one other communication device transmits the first signal to the specific communication device; and the communication method further includes (c) transmitting a second signal from the specific communication device to the specific transport carriage through a communication channel passing through the at least one other communication device, the second signal being a response signal responding to the first signal.",
    "4. The communication method according to claim 3, wherein: the plurality of communication devices includes at least three communication devices; the first signal includes a radio wave strength at which each of the at least one other communication device has received the first signal from the specific transport carriage; in (b), each of the at least one other communication device transmits the first signal including the radio wave strength to the specific communication device; and in (c), the specific communication device transmits the second signal to the specific transport carriage through a communication channel that passes through a communication device, among the at least one other communication device, that corresponds to the radio wave strength that is the strongest radio wave strength included in the first signal transmitted by the at least one other communication device.",
    "5. The communication method according to claim 3, wherein the plurality of communication devices are connected to each other by a hardwire cable.",
    "6. A transport system comprising: a plurality of transport carriages, each transporting a transported object; and a plurality of communication devices connected one-to-one with corresponding ones of a plurality of equipment onto which the transported objects are loaded, and the plurality of communication devices being communicably connected to each other in advance; wherein a specific transport carriage among the plurality of transport carriages transmits, to the plurality of communication devices, a first signal having a specific communication device among the plurality of communication devices as a final transmission destination; the specific communication device receives the first signal from the specific transport carriage through a communication channel that passes through at least one other communication device among the plurality of communication devices; and the first signal is a signal communicated for the specific transport carriage to transfer the transported object to and from a specific one of the equipment which is connected one-to-one with the specific communication device; the plurality of communication devices includes at least three communication devices; the first signal includes time information identifying a time for each of the at least one other communication device to transmit the first signal to the specific communication device; and the specific communication device receives the first signal from the specific transport carriage through a communication channel passing through the at least one other communication device by each of the at least one other communication device transmitting the first signal to the specific communication device at the time identified by the time information.",
    "7. The transport system according to claim 6, wherein the plurality of communication devices are connected to each other by a hardwire cable.",
    "8. A transport system comprising: a plurality of transport carriages, each transporting a transported object; and a plurality of communication devices connected one-to-one with corresponding ones of a plurality of equipment onto which the transported objects are loaded, and the plurality of communication devices being communicably connected to each other in advance; wherein a specific transport carriage among the plurality of transport carriages transmits, to the plurality of communication devices, a first signal having a specific communication device among the plurality of communication devices as a final transmission destination; the specific communication device receives the first signal from the specific transport carriage through a communication channel that passes through at least one other communication device among the plurality of communication devices; and the first signal is a signal communicated for the specific transport carriage to transfer the transported object to and from a specific one of the equipment which is connected one-to-one with the specific communication device; the specific communication device receives the first signal from the specific transport carriage through a communication channel passing through the at least one other communication device by each of the at least one other communication device transmitting the first signal to the specific communication device; and the specific communication device transmits a second signal to the specific transport carriage through a communication channel passing through the at least one other communication device, the second signal being a response signal responding to the first signal.",
    "9. The transport system according to claim 8, wherein: the plurality of communication devices includes at least three communication devices; the first signal includes a radio wave strength at which each of the at least one other communication device has received the first signal from the specific transport carriage; the specific communication device receives the first signal from the specific transport carriage through a communication channel passing through the at least one other communication device by each of the at least one other communication device transmitting the first signal including the radio wave strength to the specific communication device; and the specific communication device transmits the second signal to the specific transport carriage through a communication channel that passes through a communication device, among the at least one other communication device, that corresponds to the radio wave strength that is the strongest radio wave strength included in the first signal transmitted by the at least one other communication device.",
    "10. The transport system according to claim 8, wherein the plurality of communication devices are connected to each other by a hardwire cable.",
    "11. A communication device in a transport system, the transport system including a plurality of transport carriages, each transporting a transported object, and a plurality of the communication devices connected one-to-one with corresponding ones of a plurality of equipment onto which the transported objects are loaded, and the plurality of communication devices being communicably connected to each other in advance, wherein when a specific transport carriage among the plurality of transport carriages has transmitted, to the plurality of communication devices, a first signal having the communication device among the plurality of communication devices as a final transmission destination, the communication device receives the first signal from the specific transport carriage through a communication channel passing through at least one other communication device among the plurality of communication devices; and the first signal is a signal communicated for the specific transport carriage to transfer the transported object to and from a specific one of the equipment which is connected one-to-one with the communication device; the plurality of communication devices includes at least three communication devices; the first signal includes time information identifying a time for each of the at least one other communication device to transmit the first signal to the communication device; and the communication device receives the first signal from the specific transport carriage through a communication channel passing through the at least one other communication device by each of the at least one other communication device transmitting the first signal to the communication device at the time identified by the time information.",
    "12. The communication device according to claim 11, wherein the plurality of communication devices are connected to each other by a hardwire cable.",
    "13. The communication device according to claim 11, wherein when a specific transport carriage among the plurality of transport carriages has transmitted, to the plurality of communication devices, a first signal having as a final transmission destination a specific communication device, among the plurality of communication devices, that is different from the communication device, the communication device transmits the first signal received from the transport carriage to the specific communication device.",
    "14. A communication device in a transport system, the transport system including a plurality of transport carriages, each transporting a transported object, and a plurality of the communication devices connected one-to-one with corresponding ones of a plurality of equipment onto which the transported objects are loaded, and the plurality of communication devices being communicably connected to each other in advance, wherein when a specific transport carriage among the plurality of transport carriages has transmitted, to the plurality of communication devices, a first signal having the communication device among the plurality of communication devices as a final transmission destination, the communication device receives the first signal from the specific transport carriage through a communication channel passing through at least one other communication device among the plurality of communication devices; and the first signal is a signal communicated for the specific transport carriage to transfer the transported object to and from a specific one of the equipment which is connected one-to-one with the communication device; the communication device receives the first signal from the specific transport carriage through a communication channel passing through the at least one other communication device by each of the at least one other communication device transmitting the first signal to the communication device; and the communication device transmits a second signal to the specific transport carriage through a communication channel passing through the at least one other communication device, the second signal being a response signal responding to the first signal.",
    "15. The communication device according to claim 14, wherein: the plurality of communication devices includes at least three devices; the first signal includes a radio wave strength at which each of the at least one other communication device has received the first signal from the specific transport carriage; the communication device receives the first signal from the specific transport carriage through a communication channel passing through the at least one other communication device by each of the at least one other communication device transmitting the first signal including the radio wave strength to the communication device; and the communication device transmits the second signal to the specific transport carriage through a communication channel that passes through a communication device, among the at least one other communication device, that corresponds to the radio wave strength that is the strongest radio wave strength included in the first signal transmitted by the at least one other communication device.",
    "16. The communication device according to claim 14, wherein the plurality of communication devices are connected to each other by a hardwire cable.",
    "17. The communication device according to claim 14, wherein when a specific transport carriage among the plurality of transport carriages has transmitted, to the plurality of communication devices, a first signal having as a final transmission destination a specific communication device, among the plurality of communication devices, that is different from the communication device, the communication device transmits the first signal received from the transport carriage to the specific communication device.",
    "18. A communication method of a transport system, the transport system including a plurality of transport carriages, each transporting a transported object, and a plurality of communication devices connected one-to-one with corresponding ones of a plurality of equipment onto which the transported objects are loaded, the communication method comprising: (a) transmitting, from a specific transport carriage among the plurality of transport carriages to at least one of (i) the plurality of communication devices and (ii) at least one other transport carriage of the plurality of transport carriages, a first signal having a specific communication device among the plurality of communication devices as a final transmission destination; and (b) receiving, in the specific communication device, the first signal through at least one of a communication channel passing through at least one other communication device among the plurality of communication devices and a communication channel passing through the at least one other transport carriage; wherein the first signal is a signal communicated for the specific transport carriage to transfer the transported object to and from a specific one of the equipment which is connected one-to-one with the specific communication device; the plurality of communication devices includes at least three communication devices; the first signal includes time information identifying a time for each of the at least one other communication device to transmit the first signal to the specific communication device; and in (b), each of the at least one other communication device transmits the first signal to the specific communication device at the time identified by the time information.",
    "19. The communication method according to claim 18, wherein the plurality of communication devices are connected to each other by a hardwire cable.",
    "20. A communication method of a transport system, the transport system including a plurality of transport carriages, each transporting a transported object, and a plurality of communication devices connected one-to-one with corresponding ones of a plurality of equipment onto which the transported objects are loaded, the communication method comprising: (a) transmitting, from a specific transport carriage among the plurality of transport carriages to at least one of (i) the plurality of communication devices and (ii) at least one other transport carriage of the plurality of transport carriages, a first signal having a specific communication device among the plurality of communication devices as a final transmission destination; and (b) receiving, in the specific communication device, the first signal through at least one of a communication channel passing through at least one other communication device among the plurality of communication devices and a communication channel passing through the at least one other transport carriage; wherein the first signal is a signal communicated for the specific transport carriage to transfer the transported object to and from a specific one of the equipment which is connected one-to-one with the specific communication device; in (b), each of the at least one other communication device transmits the first signal to the specific communication device; and the communication method further includes (c) transmitting a second signal from the specific communication device to the specific transport carriage through a communication channel passing through the at least one other communication device, the second signal being a response signal responding to the first signal.",
    "21. The communication method according to claim 20, wherein the plurality of communication devices are connected to each other by a hardwire cable.",
    "22. The communication method according to claim 20, wherein: the plurality of communication devices includes at least three communication devices; the first signal includes a radio wave strength at which each of the at least one other communication device has received the first signal from the specific transport carriage; in (b), each of the at least one other communication device transmits the first signal including the radio wave strength to the specific communication device; and in (c), the specific communication device transmits the second signal to the specific transport carriage through a communication channel that passes through a communication device, among the at least one other communication device, that corresponds to the radio wave strength that is the strongest radio wave strength included in the first signal transmitted by the at least one other communication device."
  ],
  "description_excerpt": "The present invention relates to a communication method of a transport system, a transport system, and a communication device.\n\nA system including overhead traveling carriages that transport semiconductor wafers or the like and semiconductor manufacturing apparatuses that process the semiconductor wafers or the like has been disclosed (see, for example, International Publication No. 2011/155040 and Japanese Patent No. 4471118). The overhead traveling carriage stops traveling above a loading port provided in the semiconductor manufacturing apparatus, and transfers semiconductor wafers or the like to and from the loading port. An optical communication terminal connected to the semiconductor manufacturing apparatus is provided above the stopping position of the overhead traveling carriage. Upon stopping, the overhead traveling carriage communicates with the optical communication terminal for the purpose of transferring the semiconductor wafers or the like (communication for performing interlock processing; also referred to as “interlock communication”). Accordingly, when, for example, transferring semiconductor wafers or the like to the loading port, the overhead traveling carriage will not move to the next step unless a specific condition is satisfied, and the transfer of semiconductor wafers or the like from the overhead traveling carriage to the loading port can therefore be performed safely and reliably.\n\nThe interlock communication is executed through optical communication in the above-described system.",
  "cpc": [
    "H10P 72/0612",
    "B65G 1/0457",
    "B65G 2201/0297",
    "H01L 21/67276",
    "H01L 21/67724",
    "H01L 21/67733",
    "H04B 17/318",
    "H04L 1/22",
    "H04L 2001/0097",
    "H04L 67/12",
    "H04W 88/04",
    "H10P 72/3214",
    "H10P 72/3221"
  ],
  "ipc": [
    "B65G 1/04",
    "H01L 21/67",
    "H01L 21/677",
    "H04B 17/318",
    "H04L 67/12"
  ],
  "assignees": [
    "Murata Machinery Ltd"
  ],
  "inventors": [
    "Wataru Kitamura",
    "Munekuni Oshima",
    "Tetsuya Kuwahara"
  ],
  "filing_date": "2019-04-19",
  "publication_date": "2025-01-14",
  "grant_date": "2025-01-14",
  "priority_date": "2018-06-20",
  "application_number": "US-201917251245-A",
  "family_id": "68983983",
  "cited_by_count": 0,
  "citations": [
    "JP4471118B2",
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    "JP5682835B2",
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    "US20160276192A1",
    "KR20160021626A",
    "US20160050649A1",
    "US20170127405A1",
    "KR20170051347A",
    "US20210227536A1",
    "US20190070846A1",
    "US20190092578A1",
    "US20190160609A1"
  ]
}