Patent · US2018308997A1 · A1 · US
Plzt thin film capacitors apparatus with enhanced photocurrent and power conversion efficiency and method thereof
- (11) Publication number
- US2018308997A1
- (21) Application number
- 15/957,340
- (22) Filing date
- 2018-04-19
- (30) Priority date
- 2017-04-19
- (43) Publication date
- 2018-10-25
- (52) CPC
- H10F Inorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation: 77/12, 19/35, 30/10, 30/222, 30/227, 77/247
- G01J Measurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light; colorimetry; radiation pyrometry: 1/0219, 1/0238, 1/429, 1/44, 2001/0257, 2001/4266, 2001/446, 5/046, 5/10, 5/34
- H01L Electric elements: 31/032, 31/0465, 31/09
- Y02E Reduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution: 10/50
- (73) Assignee
- UNIV ALABAMA
- (54) Title
- Plzt thin film capacitors apparatus with enhanced photocurrent and power conversion efficiency and method thereof
- (57) Abstract
The exemplified systems, and method thereof, includes PLZT thin film (Pb 0.95 La 0.05 Zr 0.54 Ti 0.46 O 3) paired with a bottom metal and top transparent conductive oxide, that forms a capacitor structure with enhanced photocurrent and power conversion efficiency. The exemplified systems use metal electrode (platinum) as bottom electrode and a transparent oxide (Indium Tin Oxide - ITO) as the top electrode. In some embodiments, the capacitor structure are used in a solar cells, ultraviolet sensors, or UV indexing sensors. In some embodiments, the capacitor structure are energy generation or for medical diagnostics (e.g., for skin care application).
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Claims (1)
- An apparatus comprising: a substrate; a bottom layer coupled to the substrate, the bottom layer forming an electrode that comprises a material that includes, in part, platinum; a thin film layer coupled to the bottom layer, the thin film layer substantially spanning the bottom layer and comprising a lanthanum-doped lead zirconate titanate thin film material; and an array of top electrodes that collectively form a top layer over the thin film layer so as to form a plurality of capacitors, each of the top electrodes comprising a transparent oxide layer. 2. The apparatus of claim 1, wherein the lanthanum-doped lead zirconate titanate thin film material comprises Pb 0.95 La 0.05 Zr 0.54 Ti 0.46 O 3. 3. The apparatus of claim 2, wherein the bottom layer comprises a material selected from the group consisting of Al, Au, Pt, LaNiO 3, LaAlO 3, LSMO, LSCO, RuO x, Nb:SrTiO 3, ITO, and a combination thereof, and wherein the substrate comprises a material selected from the group consisting TiO 2, SiO 2, Si, and a combination thereof. 4. The apparatus of claim 1, wherein the thin film layer comprises a ferroelectric thin film material, and wherein the top electrode consists of transparent indium tin oxide (ITO). 5. The apparatus of claim 1, wherein each formed capacitor of the plurality of capacitors has a light-to-electricity conversion efficiency of at least 0.05%, and wherein each of formed capacitor of the plurality of capacitors forms a solar cell. 6. The apparatus of claim 1, wherein each formed capacitor of the plurality of capacitors has a photocurrent density J sc of at least −6.83×10 −5 A/cm 2 (Amp per cm 2), and wherein each of the formed capacitor of the plurality of capacitors forms an ultraviolet sensor. 7. The apparatus of claim 6, wherein the thin film layer is configured as a sensing layer for the ultraviolet sensor. 8. The apparatus of claim 1, wherein the bottom layer comprises a composite selected from the metal consisting of Au, Pt, and a combination thereof and an oxide group consisting of LaNiO 3 LaAlO 3, LSMO, LSCO, RuO x, Nb:SrTiO 3, ITO, and a combination thereof. 9. The apparatus of claim 1, wherein each formed capacitor of the plurality of capacitors has an operational spectral wavelength range that, at least, spans a range consisting of between about 315 nm and about 400 nm, between about 280 nm and about 315 nm, and between about between 200-800 nm. 10. The apparatus of claim 1, wherein the array of top electrodes comprises a plurality of structures that form gaps thereamong so as to form the plurality of capacitors, wherein the plurality of capacitors include a first top electrode of the array that forms a capacitor with a second top electrode of the array. 11. The apparatus of claim 1, wherein two or more electrodes of the array are electrically linked by a connection member, wherein the two or more electrodes forming a capacitor with a portion of the bottom layer across a portion of the thin film layer or the two or more electrodes forming a capacitor with another electrode of the array. 12. The apparatus of claim 1 further comprising: a seed layer comprising a material selected from the group consisting of PbxTiO 3, where x=1.0, 1.05, 1.1, or 1.2; PbO, PbZrO 3; LaNiO 3, TiO x where x≤2; SrTiO 3; SrRuO 3; La x Sr 1-x CoO 3, where 0<x<1; and La x Sr 1-x MnO 3 where 0<x<1. 13. The apparatus of claim 1, further comprising an ultraviolet-light indexing device comprising: a display; and a sensing element configured to respond to UV radiation, the sensing element comprising the substrate, the bottom layer, the thin film layer, and the top electrode; and electronic circuitry coupled to an output of the sensing element to receive an electric output, or a signal derived therefrom, generated from the sensing element in response to exposure of the sensing element by the UV radiation, the electronic circuitry being coupled to the display and configured to present an index parameter generated from with the electric output. 14. The apparatus of claim 13, wherein the apparatus is configured as a wearable or is embedded in an article of clothing. 15. The apparatus of claim 14, further comprising: a wireless transceiver, the wireless transceiver being coupled to the electronic circuitry and being configured to transmit to generated index parameter to a computing device. 16. The apparatus of claim 13, further comprising: a processor; and a memory, the memory having instructions stored thereon, wherein execution of the instructions, cause the processor to: calculate an index parameter from a parameter derived from the electric output, wherein the instructions, when executed by the processor, further cause the processor to, cause presentation of the index parameter or one of a plurality of pre-defined messages, wherein each of the plurality of pre-defined messages is associated with a corresponding UV index tier to which the index parameter is compared. 17. The apparatus claim 16, wherein the instructions, when executed by the processor, further cause the processor to cause presentation, at the display or at a remote computing device, of one of a plurality of pre-defined messages, each of the plurality of pre-defined messages being associated with an amount of sun protection. 18. The apparatus of claim 16, wherein the instructions, when executed by the processor, further cause the processor to cause presentation, at the display or at a remote computing device, of one of a plurality of pre-defined messages including a first message directed to presence, or degree of, UV-A, and a second message directed to presence, or degree, of UV-B. 19. The apparatus of claim 16, wherein the electronic circuitry comprises: an amplifier circuit; an analog-to-digital conversion circuit; a processor; and a memory, the memory having instructions stored thereon, wherein execution of the instructions, cause the processor to calculate an index parameter from a parameter derived, via the analog-to-digital convert circuit; from the electric output. 20. A method of generating electric energy, comprising: exposing a solar cell to electromagnetic radiation, the solar cell comprising: a substrate; a bottom layer coupled to the substrate, the bottom layer forming an electrode that comprises a material that includes, in part, platinum; a thin film layer coupled to the bottom layer, the thin film layer substantially spanning the bottom layer and comprising a lanthanum-doped lead zirconate titanate thin film material; and a top electrode of an array of top electrodes that collectively form a top layer over the thin film layer so as to form a plurality of capacitors with the bottom layer, each of the top electrodes comprising a transparent oxide layer, wherein the exposure causes generation of a photocurrent from the thin film layer. 21. A method of sensing ultra-violet radiation, comprising: exposing a sensor to electromagnetic radiation, the sensor comprising: a substrate; a bottom layer coupled to the substrate, the bottom layer forming an electrode that comprises a material that includes, in part, platinum; a thin film layer coupled to the bottom layer, the thin film layer substantially spanning the bottom layer and comprising a lanthanum-doped lead zirconate titanate thin film material; and one or more top electrodes of an array of top electrodes that collectively form a top layer over the thin film layer so as to form a plurality of capacitors with the bottom layer, each of the top electrodes comprising a transparent oxide layer, wherein the exposure causes generation of a photocurrent from the thin film layer. 22.- 42. (canceled)
Record as JSON
{
"publication_number": "US2018308997A1",
"country": "US",
"kind": "A1",
"title": "Plzt thin film capacitors apparatus with enhanced photocurrent and power conversion efficiency and method thereof",
"abstract": "The exemplified systems, and method thereof, includes PLZT thin film (Pb 0.95 La 0.05 Zr 0.54 Ti 0.46 O 3) paired with a bottom metal and top transparent conductive oxide, that forms a capacitor structure with enhanced photocurrent and power conversion efficiency. The exemplified systems use metal electrode (platinum) as bottom electrode and a transparent oxide (Indium Tin Oxide - ITO) as the top electrode. In some embodiments, the capacitor structure are used in a solar cells, ultraviolet sensors, or UV indexing sensors. In some embodiments, the capacitor structure are energy generation or for medical diagnostics (e.g., for skin care application).",
"claims": [
"1. An apparatus comprising: a substrate; a bottom layer coupled to the substrate, the bottom layer forming an electrode that comprises a material that includes, in part, platinum; a thin film layer coupled to the bottom layer, the thin film layer substantially spanning the bottom layer and comprising a lanthanum-doped lead zirconate titanate thin film material; and an array of top electrodes that collectively form a top layer over the thin film layer so as to form a plurality of capacitors, each of the top electrodes comprising a transparent oxide layer. 2. The apparatus of claim 1, wherein the lanthanum-doped lead zirconate titanate thin film material comprises Pb 0.95 La 0.05 Zr 0.54 Ti 0.46 O 3. 3. The apparatus of claim 2, wherein the bottom layer comprises a material selected from the group consisting of Al, Au, Pt, LaNiO 3, LaAlO 3, LSMO, LSCO, RuO x, Nb:SrTiO 3, ITO, and a combination thereof, and wherein the substrate comprises a material selected from the group consisting TiO 2, SiO 2, Si, and a combination thereof. 4. The apparatus of claim 1, wherein the thin film layer comprises a ferroelectric thin film material, and wherein the top electrode consists of transparent indium tin oxide (ITO). 5. The apparatus of claim 1, wherein each formed capacitor of the plurality of capacitors has a light-to-electricity conversion efficiency of at least 0.05%, and wherein each of formed capacitor of the plurality of capacitors forms a solar cell. 6. The apparatus of claim 1, wherein each formed capacitor of the plurality of capacitors has a photocurrent density J sc of at least −6.83×10 −5 A/cm 2 (Amp per cm 2), and wherein each of the formed capacitor of the plurality of capacitors forms an ultraviolet sensor. 7. The apparatus of claim 6, wherein the thin film layer is configured as a sensing layer for the ultraviolet sensor. 8. The apparatus of claim 1, wherein the bottom layer comprises a composite selected from the metal consisting of Au, Pt, and a combination thereof and an oxide group consisting of LaNiO 3 LaAlO 3, LSMO, LSCO, RuO x, Nb:SrTiO 3, ITO, and a combination thereof. 9. The apparatus of claim 1, wherein each formed capacitor of the plurality of capacitors has an operational spectral wavelength range that, at least, spans a range consisting of between about 315 nm and about 400 nm, between about 280 nm and about 315 nm, and between about between 200-800 nm. 10. The apparatus of claim 1, wherein the array of top electrodes comprises a plurality of structures that form gaps thereamong so as to form the plurality of capacitors, wherein the plurality of capacitors include a first top electrode of the array that forms a capacitor with a second top electrode of the array. 11. The apparatus of claim 1, wherein two or more electrodes of the array are electrically linked by a connection member, wherein the two or more electrodes forming a capacitor with a portion of the bottom layer across a portion of the thin film layer or the two or more electrodes forming a capacitor with another electrode of the array. 12. The apparatus of claim 1 further comprising: a seed layer comprising a material selected from the group consisting of PbxTiO 3, where x=1.0, 1.05, 1.1, or 1.2; PbO, PbZrO 3; LaNiO 3, TiO x where x≤2; SrTiO 3; SrRuO 3; La x Sr 1-x CoO 3, where 0<x<1; and La x Sr 1-x MnO 3 where 0<x<1. 13. The apparatus of claim 1, further comprising an ultraviolet-light indexing device comprising: a display; and a sensing element configured to respond to UV radiation, the sensing element comprising the substrate, the bottom layer, the thin film layer, and the top electrode; and electronic circuitry coupled to an output of the sensing element to receive an electric output, or a signal derived therefrom, generated from the sensing element in response to exposure of the sensing element by the UV radiation, the electronic circuitry being coupled to the display and configured to present an index parameter generated from with the electric output. 14. The apparatus of claim 13, wherein the apparatus is configured as a wearable or is embedded in an article of clothing. 15. The apparatus of claim 14, further comprising: a wireless transceiver, the wireless transceiver being coupled to the electronic circuitry and being configured to transmit to generated index parameter to a computing device. 16. The apparatus of claim 13, further comprising: a processor; and a memory, the memory having instructions stored thereon, wherein execution of the instructions, cause the processor to: calculate an index parameter from a parameter derived from the electric output, wherein the instructions, when executed by the processor, further cause the processor to, cause presentation of the index parameter or one of a plurality of pre-defined messages, wherein each of the plurality of pre-defined messages is associated with a corresponding UV index tier to which the index parameter is compared. 17. The apparatus claim 16, wherein the instructions, when executed by the processor, further cause the processor to cause presentation, at the display or at a remote computing device, of one of a plurality of pre-defined messages, each of the plurality of pre-defined messages being associated with an amount of sun protection. 18. The apparatus of claim 16, wherein the instructions, when executed by the processor, further cause the processor to cause presentation, at the display or at a remote computing device, of one of a plurality of pre-defined messages including a first message directed to presence, or degree of, UV-A, and a second message directed to presence, or degree, of UV-B. 19. The apparatus of claim 16, wherein the electronic circuitry comprises: an amplifier circuit; an analog-to-digital conversion circuit; a processor; and a memory, the memory having instructions stored thereon, wherein execution of the instructions, cause the processor to calculate an index parameter from a parameter derived, via the analog-to-digital convert circuit; from the electric output. 20. A method of generating electric energy, comprising: exposing a solar cell to electromagnetic radiation, the solar cell comprising: a substrate; a bottom layer coupled to the substrate, the bottom layer forming an electrode that comprises a material that includes, in part, platinum; a thin film layer coupled to the bottom layer, the thin film layer substantially spanning the bottom layer and comprising a lanthanum-doped lead zirconate titanate thin film material; and a top electrode of an array of top electrodes that collectively form a top layer over the thin film layer so as to form a plurality of capacitors with the bottom layer, each of the top electrodes comprising a transparent oxide layer, wherein the exposure causes generation of a photocurrent from the thin film layer. 21. A method of sensing ultra-violet radiation, comprising: exposing a sensor to electromagnetic radiation, the sensor comprising: a substrate; a bottom layer coupled to the substrate, the bottom layer forming an electrode that comprises a material that includes, in part, platinum; a thin film layer coupled to the bottom layer, the thin film layer substantially spanning the bottom layer and comprising a lanthanum-doped lead zirconate titanate thin film material; and one or more top electrodes of an array of top electrodes that collectively form a top layer over the thin film layer so as to form a plurality of capacitors with the bottom layer, each of the top electrodes comprising a transparent oxide layer, wherein the exposure causes generation of a photocurrent from the thin film layer. 22.- 42. (canceled)"
],
"cpc": [
"H10F 77/12",
"G01J 1/0219",
"G01J 1/0238",
"G01J 1/429",
"G01J 1/44",
"G01J 2001/0257",
"G01J 2001/4266",
"G01J 2001/446",
"G01J 5/046",
"G01J 5/10",
"G01J 5/34",
"H01L 31/032",
"H01L 31/0465",
"H01L 31/09",
"H10F 19/35",
"H10F 30/10",
"H10F 30/222",
"H10F 30/227",
"H10F 77/247",
"Y02E 10/50"
],
"assignees": [
"UNIV ALABAMA"
],
"filing_date": "2018-04-19",
"publication_date": "2018-10-25",
"priority_date": "2017-04-19",
"application_number": "US-201815957340-A",
"family_id": "63854748"
}
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