LIGA
Term · Industrial and trades · MLC-T-IND-003334
A microfabrication process for creating high-aspect-ratio microstructures, combining X-ray lithography, electroplating, and molding. The name is a German acronym for Lithographie, Galvanoformung, and Abformung, which describes the three main steps: exposing a thick resist to X-rays, electroplating metal into the resulting voids, and using the metal structure as a mold. This technique produces components with heights of several millimeters and structural details in the micrometer range, making it suitable for micro-optics and microfluidic devices.
| Identifier | MLC-T-IND-003334 |
|---|---|
| Field | Industrial and trades |
| Subject | Manufacturing |
| Translations | German: LIGA; Spanish: LIGA; French: LIGA |
Record as JSON
{
"id": "MLC-T-IND-003334",
"term": "LIGA",
"field": "Industrial and trades",
"definition": "A microfabrication process for creating high-aspect-ratio microstructures, combining X-ray lithography, electroplating, and molding. The name is a German acronym for Lithographie, Galvanoformung, and Abformung, which describes the three main steps: exposing a thick resist to X-rays, electroplating metal into the resulting voids, and using the metal structure as a mold. This technique produces components with heights of several millimeters and structural details in the micrometer range, making it suitable for micro-optics and microfluidic devices.",
"subject": "Manufacturing",
"translations": {
"de": "LIGA",
"es": "LIGA",
"fr": "LIGA"
},
"url": "https://mlchart.com/terminology/industrial/liga/"
}
Record 3,658 of 7,361 in Industrial and trades terminology (MLC-0113). Request the full dataset.