Precursor
Term · Industrial and trades · MLC-T-IND-004480
A chemical compound or material that is transformed into another substance during a manufacturing process, particularly in semiconductor fabrication. In processes like chemical vapor deposition (CVD), precursors are volatile substances that react on a substrate surface to form a desired thin film, such as a dielectric or conductive layer. For example, silane (SiH4) is a common precursor used to deposit silicon dioxide or silicon nitride films on wafers.
| Identifier | MLC-T-IND-004480 |
|---|---|
| Field | Industrial and trades |
| Subject | Electrical engineering |
| Translations | German: Vorläufer; Spanish: precursor; French: précurseur |
Record as JSON
{
"id": "MLC-T-IND-004480",
"term": "Precursor",
"field": "Industrial and trades",
"definition": "A chemical compound or material that is transformed into another substance during a manufacturing process, particularly in semiconductor fabrication. In processes like chemical vapor deposition (CVD), precursors are volatile substances that react on a substrate surface to form a desired thin film, such as a dielectric or conductive layer. For example, silane (SiH4) is a common precursor used to deposit silicon dioxide or silicon nitride films on wafers.",
"subject": "Electrical engineering",
"translations": {
"de": "Vorläufer",
"es": "precursor",
"fr": "précurseur"
},
"url": "https://mlchart.com/terminology/industrial/precursor/"
}
Record 4,895 of 7,361 in Industrial and trades terminology (MLC-0113). Request the full dataset.