MLchartDataset catalogue

Patent · US10946577B2 · B2 · US

Imprinting apparatus

(11) Publication number
US10946577B2
(21) Application number
15/946,790
(22) Filing date
2018-04-06
(30) Priority date
2017-10-02
(43) Publication date
2021-03-16
(45) Date of grant
2021-03-16
(51) IPC
B29C 59/04; B41L 47/46; G03F 7/00
(52) CPC
  • G03F Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; materials therefor; originals therefor; apparatus specially adapted therefor: 7/0002
  • B29C Shaping or joining of plastics; shaping of material in a plastic state, not otherwise provided for; after-treatment of the shaped products, e.g. repairing: 59/04
  • B41L Apparatus or devices for manifolding, duplicating or printing for office or other commercial purposes; addressing machines or like series-printing machines: 47/46
  • H10W Generic packages, interconnections, connectors or other constructional details of devices covered by class H10: 72/0198
(73) Assignee
Samsung Electronics Co Ltd
(72) Inventors
Ho Yu; Byeong Sang KIM; Jung Wook Kim; Kyung Bin PARK; Ki Ju Sohn; Eun Soo Hwang
(54) Title
Imprinting apparatus
(57) Abstract

An imprinting apparatus includes a first frame, a pressure roller rotatably supported on a first end of the first frame, a second frame including a support portion coupled to a second end of the first frame, and at least one guide portion coupled to the support portion to be laterally movable, and at least one load roller supported by the at least one guide portion, the at least one load roller being movable in a vertical direction while being rotatable and contacting a surface of the pressure roller on an upper portion of the pressure roller according to a lateral movement of the guide portion, the at least one load roller to press the pressure roller by force exerted by a load of the at least one load roller.

Full text
View on Google Patents

Claims (17)

  1. An imprinting apparatus, comprising: a first frame above an imprint mold, the first frame being movable in a single direction along the imprint mold; a pressure roller rotatably supported on a first end of the first frame; a second frame including: a support portion coupled to a second end of the first frame, and at least one guide portion coupled to the support portion to be laterally movable; at least one load roller supported by the at least one guide portion, the at least one load roller being movable in a vertical direction while being rotatable and contacting a surface of the pressure roller on an upper portion of the pressure roller according to a lateral movement of the at least one guide portion, the at least one load roller to press the pressure roller by force exerted by a load of the at least one load roller; and a driving unit on the support portion to laterally move the at least one guide portion in the single direction, the at least one guide portion being moveable independently of the first frame to vary a distance between the at least one guide portion and the first frame.
  2. The imprinting apparatus as claimed in claim 1, wherein the pressure roller and the at least one load roller are arranged in parallel to each other in a direction perpendicular to the single direction, the pressure roller and the at least one load roller having a same length in the direction perpendicular to the single direction.
  3. The imprinting apparatus as claimed in claim 1, wherein the at least one load roller includes a first load roller and a second load roller, the first load roller and the second load roller being arranged in parallel to each other in a direction perpendicular to the single direction.
  4. The imprinting apparatus as claimed in claim 3, wherein the pressure roller is between the first load roller and the second load roller, the pressure roller being in contact with the first load roller and the second load roller in a longitudinal direction.
  5. The imprinting apparatus as claimed in claim 3, wherein the first load roller and the second load roller have a same diameter and a same mass.
  6. The imprinting apparatus as claimed in claim 3, wherein: the at least one guide portion includes a first guide portion and a second guide portion coupled to the first load roller and the second load roller, respectively, and the first and second guide portions are separated and spaced apart from each other, the first and second guide portions being moveable laterally toward each other along the support portion.
  7. The imprinting apparatus as claimed in claim 6, wherein: each of the first guide portion and the second guide portion includes a groove along the vertical direction, and the first load roller and the second load roller are moveable in the vertical direction along a respective groove while maintaining contact with the pressure roller.
  8. The imprinting apparatus as claimed in claim 7, wherein the first guide portion and the second guide portion are at opposite ends of the first frame in the single direction.
  9. The imprinting apparatus as claimed in claim 1, wherein the first frame is vertically movable in a direction perpendicular to the single direction.
  10. The imprinting apparatus as claimed in claim 1, wherein a surface of the pressure roller includes a material different from a material of a surface of the at least one load roller.
  11. The imprinting apparatus as claimed in claim 1, further comprising a pressure member coupled to a central shaft of the at least one load roller.
  12. An imprinting apparatus, comprising: a first frame above an imprint mold, the first frame being moveable in a single direction along the imprint mold; a pressure roller rotatably supported on the first frame to press the imprint mold as the first frame moves; a second frame coupled to the first frame, the second frame being laterally movable; and at least one load roller rotatably supported by the second frame, while contacting the pressure roller on an upper portion of the pressure roller to press the pressure roller by force exerted by a load of the at least one load roller, the at least one load roller having a central shaft deviating from a central shaft of the pressure roller in a vertical direction perpendicular to the single direction, and moving in the vertical direction while being in contact with a surface of the pressure roller according to a lateral movement of the second frame, wherein the second frame includes a support portion coupled to the first frame, and at least one guide portion coupled to the support portion, the at least one guide portion being laterally movable in the single direction along the support portion independently of the first frame.
  13. The imprinting apparatus as claimed in claim 12, wherein the at least one load roller is rotatably coupled to one end of the at least one guide portion.
  14. An imprinting apparatus, comprising: a first frame above an imprint mold, the first frame being moveable in a single direction along the imprint mold; a pressure roller rotatably supported on the first frame to press the imprint mold as the first frame moves; a second frame including a support portion coupled to the first frame, and at least one guide portion coupled to the support portion, the at least one guide portion being laterally movable toward the first frame in the single direction on the support portion; a driving unit on the support portion, to laterally move the at least one guide portion in the single direction; a controller to control the driving unit; and at least one load roller rotatably supported on the at least one guide portion while contacting the pressure roller on an upper portion of the pressure roller to press the pressure roller by force exerted by a load of the at least one load roller, the at least one load roller changing a pressing force applied to the imprint mold by the pressure roller, while moving along a surface of the pressure roller as the at least one guide portion is moved laterally in response to a driving signal of the controller.
  15. The imprinting apparatus as claimed in claim 14, wherein the controller further includes a data storage to store data of correlation between an included angle, formed by a first virtual straight line in a direction perpendicular to the single direction and by a second virtual straight line connecting a central shaft of the at least one load roller to a central shaft of the pressure roller, and a pressing force formed as the pressure roller pressed by the at least one load roller presses the imprint mold, and determines the included angle corresponding to the pressing force to be applied to the imprint mold, with reference to the data of correlation.
  16. The imprinting apparatus as claimed in claim 14, wherein the pressure roller and the at least one load roller are arranged in parallel to each other in a direction perpendicular to the single direction.
  17. The imprinting apparatus as claimed in claim 16, wherein the at least one load roller includes a first load roller and a second load roller, the first and second load rollers have a same diameter, and included angles of the first and second load rollers are identical to each other.

Description

The present disclosure relates to an imprinting apparatus.

As the size of display devices is increased, it has become important for large-area fine patterns on substrates to have uniform quality. A nanoimprint lithography method is used in a process of forming such large-area fine patterns. In the nanoimprint lithography method, after a photocurable resin is coated on a substrate, ultraviolet light is irradiated thereonto, while a stamp having a concavo-convex pattern corresponding to a fine pattern is pressed on the photocurable resin to cure the photocurable resin. Then, the stamp is separated therefrom to form fine patterns.

According to an aspect of the present disclosure, an imprinting apparatus includes a first frame, a pressure roller rotatably supported on a first end of the first frame, a second frame including a support portion coupled to a second end of the first frame, and at least one guide portion coupled to the support portion to be laterally movable, and at least one load roller supported by the at least one guide portion, the at least one load roller being movable in a vertical direction while being rotatable and contacting a surface of the pressure roller on an upper portion of the pressure roller according to a lateral movement of the guide portion, the at least one load roller to press the pressure roller by force exerted by a load of the at least one load roller.

Citations (58)

  • US4384518A
  • US4487050A
  • US4601239A
  • US5527497A
  • US5639339A
  • US6818530B2
  • US6372608B1
  • US6645830B2
  • USRE38466E1
  • US8049161B2
  • US7781727B2
  • US7208725B2
  • US7288758B2
  • US7087932B2
  • US6818465B2
  • US6858081B2
  • US6967353B2
  • US8399944B2
  • US8536604B2
  • US7002182B2
  • US7759140B2
  • US7319044B2
  • US7154124B2
  • US7084420B2
  • US7501656B2
  • US7790482B2
  • US8029717B2
  • US7994525B2
  • US8324646B2
  • US8013352B2
  • US20070281239A1
  • US20070204953A1
  • US8735931B2
  • US20080028958A1
  • US7959312B2
  • US7709857B2
  • US7940350B2
  • US8432511B2
  • US8129711B2
  • US7964881B2
  • US8263987B2
  • US7985976B2
  • US8766295B2
  • US8502242B2
  • US8459832B2
  • US8179938B2
  • US8008683B2
  • US20110005412A1
  • KR101061183B1
  • KR101062128B1
  • US20140174306A1
  • US20150217506A1
  • JP2014054735A
  • US20150283754A1
  • US20140252679A1
  • US20140346713A1
  • WO2015186736A1
  • US20170072620A1
Record as JSON 
{
  "publication_number": "US10946577B2",
  "country": "US",
  "kind": "B2",
  "title": "Imprinting apparatus",
  "abstract": "An imprinting apparatus includes a first frame, a pressure roller rotatably supported on a first end of the first frame, a second frame including a support portion coupled to a second end of the first frame, and at least one guide portion coupled to the support portion to be laterally movable, and at least one load roller supported by the at least one guide portion, the at least one load roller being movable in a vertical direction while being rotatable and contacting a surface of the pressure roller on an upper portion of the pressure roller according to a lateral movement of the guide portion, the at least one load roller to press the pressure roller by force exerted by a load of the at least one load roller.",
  "claims": [
    "1. An imprinting apparatus, comprising: a first frame above an imprint mold, the first frame being movable in a single direction along the imprint mold; a pressure roller rotatably supported on a first end of the first frame; a second frame including: a support portion coupled to a second end of the first frame, and at least one guide portion coupled to the support portion to be laterally movable; at least one load roller supported by the at least one guide portion, the at least one load roller being movable in a vertical direction while being rotatable and contacting a surface of the pressure roller on an upper portion of the pressure roller according to a lateral movement of the at least one guide portion, the at least one load roller to press the pressure roller by force exerted by a load of the at least one load roller; and a driving unit on the support portion to laterally move the at least one guide portion in the single direction, the at least one guide portion being moveable independently of the first frame to vary a distance between the at least one guide portion and the first frame.",
    "2. The imprinting apparatus as claimed in claim 1, wherein the pressure roller and the at least one load roller are arranged in parallel to each other in a direction perpendicular to the single direction, the pressure roller and the at least one load roller having a same length in the direction perpendicular to the single direction.",
    "3. The imprinting apparatus as claimed in claim 1, wherein the at least one load roller includes a first load roller and a second load roller, the first load roller and the second load roller being arranged in parallel to each other in a direction perpendicular to the single direction.",
    "4. The imprinting apparatus as claimed in claim 3, wherein the pressure roller is between the first load roller and the second load roller, the pressure roller being in contact with the first load roller and the second load roller in a longitudinal direction.",
    "5. The imprinting apparatus as claimed in claim 3, wherein the first load roller and the second load roller have a same diameter and a same mass.",
    "6. The imprinting apparatus as claimed in claim 3, wherein: the at least one guide portion includes a first guide portion and a second guide portion coupled to the first load roller and the second load roller, respectively, and the first and second guide portions are separated and spaced apart from each other, the first and second guide portions being moveable laterally toward each other along the support portion.",
    "7. The imprinting apparatus as claimed in claim 6, wherein: each of the first guide portion and the second guide portion includes a groove along the vertical direction, and the first load roller and the second load roller are moveable in the vertical direction along a respective groove while maintaining contact with the pressure roller.",
    "8. The imprinting apparatus as claimed in claim 7, wherein the first guide portion and the second guide portion are at opposite ends of the first frame in the single direction.",
    "9. The imprinting apparatus as claimed in claim 1, wherein the first frame is vertically movable in a direction perpendicular to the single direction.",
    "10. The imprinting apparatus as claimed in claim 1, wherein a surface of the pressure roller includes a material different from a material of a surface of the at least one load roller.",
    "11. The imprinting apparatus as claimed in claim 1, further comprising a pressure member coupled to a central shaft of the at least one load roller.",
    "12. An imprinting apparatus, comprising: a first frame above an imprint mold, the first frame being moveable in a single direction along the imprint mold; a pressure roller rotatably supported on the first frame to press the imprint mold as the first frame moves; a second frame coupled to the first frame, the second frame being laterally movable; and at least one load roller rotatably supported by the second frame, while contacting the pressure roller on an upper portion of the pressure roller to press the pressure roller by force exerted by a load of the at least one load roller, the at least one load roller having a central shaft deviating from a central shaft of the pressure roller in a vertical direction perpendicular to the single direction, and moving in the vertical direction while being in contact with a surface of the pressure roller according to a lateral movement of the second frame, wherein the second frame includes a support portion coupled to the first frame, and at least one guide portion coupled to the support portion, the at least one guide portion being laterally movable in the single direction along the support portion independently of the first frame.",
    "13. The imprinting apparatus as claimed in claim 12, wherein the at least one load roller is rotatably coupled to one end of the at least one guide portion.",
    "14. An imprinting apparatus, comprising: a first frame above an imprint mold, the first frame being moveable in a single direction along the imprint mold; a pressure roller rotatably supported on the first frame to press the imprint mold as the first frame moves; a second frame including a support portion coupled to the first frame, and at least one guide portion coupled to the support portion, the at least one guide portion being laterally movable toward the first frame in the single direction on the support portion; a driving unit on the support portion, to laterally move the at least one guide portion in the single direction; a controller to control the driving unit; and at least one load roller rotatably supported on the at least one guide portion while contacting the pressure roller on an upper portion of the pressure roller to press the pressure roller by force exerted by a load of the at least one load roller, the at least one load roller changing a pressing force applied to the imprint mold by the pressure roller, while moving along a surface of the pressure roller as the at least one guide portion is moved laterally in response to a driving signal of the controller.",
    "15. The imprinting apparatus as claimed in claim 14, wherein the controller further includes a data storage to store data of correlation between an included angle, formed by a first virtual straight line in a direction perpendicular to the single direction and by a second virtual straight line connecting a central shaft of the at least one load roller to a central shaft of the pressure roller, and a pressing force formed as the pressure roller pressed by the at least one load roller presses the imprint mold, and determines the included angle corresponding to the pressing force to be applied to the imprint mold, with reference to the data of correlation.",
    "16. The imprinting apparatus as claimed in claim 14, wherein the pressure roller and the at least one load roller are arranged in parallel to each other in a direction perpendicular to the single direction.",
    "17. The imprinting apparatus as claimed in claim 16, wherein the at least one load roller includes a first load roller and a second load roller, the first and second load rollers have a same diameter, and included angles of the first and second load rollers are identical to each other."
  ],
  "description_excerpt": "The present disclosure relates to an imprinting apparatus.\n\nAs the size of display devices is increased, it has become important for large-area fine patterns on substrates to have uniform quality. A nanoimprint lithography method is used in a process of forming such large-area fine patterns. In the nanoimprint lithography method, after a photocurable resin is coated on a substrate, ultraviolet light is irradiated thereonto, while a stamp having a concavo-convex pattern corresponding to a fine pattern is pressed on the photocurable resin to cure the photocurable resin. Then, the stamp is separated therefrom to form fine patterns.\n\nAccording to an aspect of the present disclosure, an imprinting apparatus includes a first frame, a pressure roller rotatably supported on a first end of the first frame, a second frame including a support portion coupled to a second end of the first frame, and at least one guide portion coupled to the support portion to be laterally movable, and at least one load roller supported by the at least one guide portion, the at least one load roller being movable in a vertical direction while being rotatable and contacting a surface of the pressure roller on an upper portion of the pressure roller according to a lateral movement of the guide portion, the at least one load roller to press the pressure roller by force exerted by a load of the at least one load roller.",
  "cpc": [
    "G03F 7/0002",
    "B29C 59/04",
    "B41L 47/46",
    "H10W 72/0198"
  ],
  "ipc": [
    "B29C 59/04",
    "B41L 47/46",
    "G03F 7/00"
  ],
  "assignees": [
    "Samsung Electronics Co Ltd"
  ],
  "inventors": [
    "Ho Yu",
    "Byeong Sang KIM",
    "Jung Wook Kim",
    "Kyung Bin PARK",
    "Ki Ju Sohn",
    "Eun Soo Hwang"
  ],
  "filing_date": "2018-04-06",
  "publication_date": "2021-03-16",
  "grant_date": "2021-03-16",
  "priority_date": "2017-10-02",
  "application_number": "US-201815946790-A",
  "family_id": "65896467",
  "cited_by_count": 2,
  "citations": [
    "US4384518A",
    "US4487050A",
    "US4601239A",
    "US5527497A",
    "US5639339A",
    "US6818530B2",
    "US6372608B1",
    "US6645830B2",
    "USRE38466E1",
    "US8049161B2",
    "US7781727B2",
    "US7208725B2",
    "US7288758B2",
    "US7087932B2",
    "US6818465B2",
    "US6858081B2",
    "US6967353B2",
    "US8399944B2",
    "US8536604B2",
    "US7002182B2",
    "US7759140B2",
    "US7319044B2",
    "US7154124B2",
    "US7084420B2",
    "US7501656B2",
    "US7790482B2",
    "US8029717B2",
    "US7994525B2",
    "US8324646B2",
    "US8013352B2",
    "US20070281239A1",
    "US20070204953A1",
    "US8735931B2",
    "US20080028958A1",
    "US7959312B2",
    "US7709857B2",
    "US7940350B2",
    "US8432511B2",
    "US8129711B2",
    "US7964881B2",
    "US8263987B2",
    "US7985976B2",
    "US8766295B2",
    "US8502242B2",
    "US8459832B2",
    "US8179938B2",
    "US8008683B2",
    "US20110005412A1",
    "KR101061183B1",
    "KR101062128B1",
    "US20140174306A1",
    "US20150217506A1",
    "JP2014054735A",
    "US20150283754A1",
    "US20140252679A1",
    "US20140346713A1",
    "WO2015186736A1",
    "US20170072620A1"
  ]
}

Record 1,720 of 8,000 in Patents full text (MLC-0201). Request the full dataset.