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Patent · US9773818B2 · B2 · US

Display device having transparent conductive film and metal film

(11) Publication number
US9773818B2
(21) Application number
14/535,601
(22) Filing date
2014-11-07
(30) Priority date
2005-10-14
(43) Publication date
2017-09-26
(45) Date of grant
2017-09-26
(51) IPC
G02F 1/1362; G02F 1/1335; G02F 1/1341; G02F 1/1368; H01L 27/12; H05B 44/00; G02F 1/1333; G02F 1/1337; G02F 1/1343; H01L 29/45
(52) CPC
  • H10D Inorganic electric semiconductor devices: 86/441, 30/6737, 30/6743, 86/0231, 86/60
  • G02F Optical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein; non-linear optics; frequency-changing of light; optical logic elements; optical analogue/digital converters: 1/133345, 1/133512, 1/133514, 1/133707, 1/1341, 1/134309, 1/134336, 1/13439, 1/136209, 1/136218, 1/136227, 1/136277, 1/136286, 1/13629, 1/1368, 2001/13629, 2201/122, 2201/123
  • H01L Semiconductor devices; electric solid state devices not otherwise provided for: 2227/323, 2251/306, 2251/308, 27/1214, 27/124, 27/1288, 27/3248, 27/3276, 27/3279, 29/458, 51/5206, 51/5212, 51/5215, 51/56
  • H05B Electric heating; electric light sources not otherwise provided for; circuit arrangements for electric light sources, in general: 33/10, 33/26
  • H10K Organic electric solid-state devices: 2102/103, 50/814, 50/816, 59/1201, 59/123, 59/131, 59/1315, 59/80516, 71/00
(73) Assignee
Semiconductor Energy Laboratory Co Ltd
(72) Inventors
Hajime Kimura
(54) Title
Display device having transparent conductive film and metal film
(57) Abstract

It is an object of the present invention to form a pixel electrode and a metal film using one resist mask in manufacturing a stacked structure by forming the metal film over the pixel electrode. A conductive film to be a pixel electrode and a metal film are stacked. A resist pattern having a thick region and a region thinner than the thick region is formed over the metal film using an exposure mask having a semi light-transmitting portion. The pixel electrode, and the metal film formed over part of the pixel electrode to be in contact therewith are formed using the resist pattern. Accordingly, a pixel electrode and a metal film can be formed using one resist mask.

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Claims (18)

  1. A display device comprising: a pixel portion over a substrate, wherein the pixel portion comprises: a semiconductor film, a wiring over and electrically connected to the semiconductor film, an organic resin layer over the wiring, a transparent conductive film over the organic resin layer, and a metal film over and in direct contact with a top surface of the transparent conductive film, wherein the metal film comprises an opening in which a region of the transparent conductive film is exposed, wherein the pixel portion comprises a first region and a second region surrounding the first region, wherein the first region has a light-transmitting property, wherein the first region comprises the organic resin layer and the transparent conductive film, wherein the second region comprises the wiring, the organic resin layer, the transparent conductive film and the metal film, wherein the top surface of the transparent conductive film is covered with the metal film in the second region, wherein a side at an end of the metal film is inclined with respect to the substrate, and wherein the inclined side at the end of the metal film is covered by an insulating film.
  2. The display device according to claim 1, further comprising a transistor including the semiconductor film, wherein the second region has a stacked structure of the semiconductor film, the organic resin layer over the semiconductor film, the transparent conductive film and the metal film.
  3. The display device according to claim 1, wherein the metal film has a stacked structure of a first layer and a second layer, wherein a side at an end of the first layer and a side at an end of the second layer are each inclined with respect to the substrate, and wherein an inclined angle of the side at the end of the first layer and an inclined angle of the side at the end of the second layer are different from each other.
  4. The display device according to claim 1, wherein a side of the transparent conductive film is inclined with respect to the substrate.
  5. An electronic device comprising: the display device according to claim 1; a speaker; a microphone; and a switch.
  6. A display device comprising: a pixel portion over a substrate, wherein the pixel portion comprises: a semiconductor film, a wiring over and electrically connected to the semiconductor film, an organic resin layer over the wiring, a transparent conductive film over the organic resin layer, and a metal film over and in direct contact with a top surface of the transparent conductive film, wherein the metal film comprises an opening in which a region of the transparent conductive film is exposed, wherein the pixel portion comprises a first region and a second region surrounding the first region, wherein the first region has a light-transmitting property, wherein the first region comprises the organic resin layer and the transparent conductive film, wherein the second region comprises the wiring, the organic resin layer, the transparent conductive film and the metal film, wherein the top surface of the transparent conductive film is covered with the metal film in the second region, wherein a side at an end of the metal film is inclined with respect to the substrate, wherein the inclined side at the end of the metal film is covered by an insulating film, wherein the transparent conductive film comprises at least one of indium tin oxide, indium tin silicon oxide, indium zinc oxide, a zinc oxide and a tin oxide, and wherein the metal film comprises at least one of Ti, Mo, Ta, Cr, W and Al.
  7. The display device according to claim 6, further comprising a transistor including the semiconductor film, wherein the second region has a stacked structure of the semiconductor film, the organic resin layer over the semiconductor film, the transparent conductive film and the metal film.
  8. The display device according to claim 6, wherein the metal film has a stacked structure of a first layer and a second layer, wherein a side at an end of the first layer and a side at an end of the second layer are each inclined with respect to the substrate, and wherein an inclined angle of the side at the end of the first layer and an inclined angle of the side at the end of the second layer are different from each other.
  9. The display device according to claim 6, wherein a side of the transparent conductive film is inclined with respect to the substrate.
  10. An electronic device comprising: the display device according to claim 6; a speaker; a microphone; and a switch.
  11. A display device comprising: a pixel portion over a first substrate, wherein the pixel portion comprises: a semiconductor film, a wiring over and electrically connected to the semiconductor film, an organic resin layer over the wiring, a transparent conductive film over the organic resin layer, a metal film over and in direct contact with a top surface of the transparent conductive film, and a light-shielding film wherein the metal film comprises an opening in which a region of the transparent conductive film is exposed, wherein the pixel portion comprises a first region and a second region surrounding the first region, wherein the first region has a light-transmitting property, wherein the first region comprises the organic resin layer and the transparent conductive film, wherein the second region comprises the wiring, the organic resin layer, the transparent conductive film, and the metal film, wherein the top surface of the transparent conductive film is covered with the metal film in the second region, wherein the light-shielding film and the metal film overlap with each other in the second region, wherein a side at an end of the metal film is inclined with respect to the first substrate, and wherein the inclined side at the end of the metal film is covered by an insulating film.
  12. The display device according to claim 11, further comprising a second substrate facing the first substrate, wherein the light-shielding film and a color filter are provided on the second substrate.
  13. The display device according to claim 12, wherein the color filter and the first region overlap with each other.
  14. The display device according to claim 11, further comprising a transistor including the semiconductor film, wherein the second region has a stacked structure of the semiconductor film, the organic resin layer over the semiconductor film, the transparent conductive film and the metal film.
  15. The display device according to claim 11, wherein the transparent conductive film comprises at least one of indium tin oxide, indium tin silicon oxide, indium zinc oxide, a zinc oxide and a tin oxide, and wherein the metal film comprises at least one of Ti, Mo, Ta, Cr, W and Al.
  16. The display device according to claim 11, wherein the metal film has a stacked structure of a first layer and a second layer, wherein a side at an end of the first layer and a side at an end of the second layer are each inclined with respect to the first substrate, and wherein an inclined angle of the side at the end of the first layer and an inclined angle of the side at the end of the second layer are different from each other.
  17. The display device according to claim 11, wherein a side of the transparent conductive film is inclined with respect to the first substrate.
  18. An electronic device comprising: the display device according to claim 11; a speaker; a microphone; and a switch.

Description

1. Field of the Invention

The present invention relates to a semiconductor device having a pixel electrode, especially a display device.

2. Description of the Related Art

In manufacturing an active matrix display device, in general, a wiring to be connected to a semiconductor film of a thin film transistor (TFT) is formed and a conductive film to be a pixel electrode is formed over the wiring. Therefore, a resist mask for forming the wiring and a resist mask for forming the pixel electrode have been required.

Further, as another example, an example is given, in which a conductive film to be connected to a semiconductor film of a TFT is formed, the conductive film is made to serve also as a pixel electrode, and a metal film is formed over the conductive film (for example, Patent Document 1: Japanese Published Patent Application No. Hei6-230425). This example is different from the example described above. A transparent conductive film is employed as the conductive film, and the transparent conductive film is directly connected to the semiconductor film. The transparent conductive film is formed from a material having high resistance in many cases; therefore, in order to cover high electric resistance of the transparent conductive film, the metal film is formed over the transparent conductive film.

Also in Patent Document 1, in which the transparent conductive film is directly connected to the semiconductor film, a resist mask for forming a pixel electrode by etching the transparent conductive film and a resist mask for etching the metal film have been required.

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Record as JSON 
{
  "publication_number": "US9773818B2",
  "country": "US",
  "kind": "B2",
  "title": "Display device having transparent conductive film and metal film",
  "abstract": "It is an object of the present invention to form a pixel electrode and a metal film using one resist mask in manufacturing a stacked structure by forming the metal film over the pixel electrode. A conductive film to be a pixel electrode and a metal film are stacked. A resist pattern having a thick region and a region thinner than the thick region is formed over the metal film using an exposure mask having a semi light-transmitting portion. The pixel electrode, and the metal film formed over part of the pixel electrode to be in contact therewith are formed using the resist pattern. Accordingly, a pixel electrode and a metal film can be formed using one resist mask.",
  "claims": [
    "1. A display device comprising: a pixel portion over a substrate, wherein the pixel portion comprises: a semiconductor film, a wiring over and electrically connected to the semiconductor film, an organic resin layer over the wiring, a transparent conductive film over the organic resin layer, and a metal film over and in direct contact with a top surface of the transparent conductive film, wherein the metal film comprises an opening in which a region of the transparent conductive film is exposed, wherein the pixel portion comprises a first region and a second region surrounding the first region, wherein the first region has a light-transmitting property, wherein the first region comprises the organic resin layer and the transparent conductive film, wherein the second region comprises the wiring, the organic resin layer, the transparent conductive film and the metal film, wherein the top surface of the transparent conductive film is covered with the metal film in the second region, wherein a side at an end of the metal film is inclined with respect to the substrate, and wherein the inclined side at the end of the metal film is covered by an insulating film.",
    "2. The display device according to claim 1, further comprising a transistor including the semiconductor film, wherein the second region has a stacked structure of the semiconductor film, the organic resin layer over the semiconductor film, the transparent conductive film and the metal film.",
    "3. The display device according to claim 1, wherein the metal film has a stacked structure of a first layer and a second layer, wherein a side at an end of the first layer and a side at an end of the second layer are each inclined with respect to the substrate, and wherein an inclined angle of the side at the end of the first layer and an inclined angle of the side at the end of the second layer are different from each other.",
    "4. The display device according to claim 1, wherein a side of the transparent conductive film is inclined with respect to the substrate.",
    "5. An electronic device comprising: the display device according to claim 1; a speaker; a microphone; and a switch.",
    "6. A display device comprising: a pixel portion over a substrate, wherein the pixel portion comprises: a semiconductor film, a wiring over and electrically connected to the semiconductor film, an organic resin layer over the wiring, a transparent conductive film over the organic resin layer, and a metal film over and in direct contact with a top surface of the transparent conductive film, wherein the metal film comprises an opening in which a region of the transparent conductive film is exposed, wherein the pixel portion comprises a first region and a second region surrounding the first region, wherein the first region has a light-transmitting property, wherein the first region comprises the organic resin layer and the transparent conductive film, wherein the second region comprises the wiring, the organic resin layer, the transparent conductive film and the metal film, wherein the top surface of the transparent conductive film is covered with the metal film in the second region, wherein a side at an end of the metal film is inclined with respect to the substrate, wherein the inclined side at the end of the metal film is covered by an insulating film, wherein the transparent conductive film comprises at least one of indium tin oxide, indium tin silicon oxide, indium zinc oxide, a zinc oxide and a tin oxide, and wherein the metal film comprises at least one of Ti, Mo, Ta, Cr, W and Al.",
    "7. The display device according to claim 6, further comprising a transistor including the semiconductor film, wherein the second region has a stacked structure of the semiconductor film, the organic resin layer over the semiconductor film, the transparent conductive film and the metal film.",
    "8. The display device according to claim 6, wherein the metal film has a stacked structure of a first layer and a second layer, wherein a side at an end of the first layer and a side at an end of the second layer are each inclined with respect to the substrate, and wherein an inclined angle of the side at the end of the first layer and an inclined angle of the side at the end of the second layer are different from each other.",
    "9. The display device according to claim 6, wherein a side of the transparent conductive film is inclined with respect to the substrate.",
    "10. An electronic device comprising: the display device according to claim 6; a speaker; a microphone; and a switch.",
    "11. A display device comprising: a pixel portion over a first substrate, wherein the pixel portion comprises: a semiconductor film, a wiring over and electrically connected to the semiconductor film, an organic resin layer over the wiring, a transparent conductive film over the organic resin layer, a metal film over and in direct contact with a top surface of the transparent conductive film, and a light-shielding film wherein the metal film comprises an opening in which a region of the transparent conductive film is exposed, wherein the pixel portion comprises a first region and a second region surrounding the first region, wherein the first region has a light-transmitting property, wherein the first region comprises the organic resin layer and the transparent conductive film, wherein the second region comprises the wiring, the organic resin layer, the transparent conductive film, and the metal film, wherein the top surface of the transparent conductive film is covered with the metal film in the second region, wherein the light-shielding film and the metal film overlap with each other in the second region, wherein a side at an end of the metal film is inclined with respect to the first substrate, and wherein the inclined side at the end of the metal film is covered by an insulating film.",
    "12. The display device according to claim 11, further comprising a second substrate facing the first substrate, wherein the light-shielding film and a color filter are provided on the second substrate.",
    "13. The display device according to claim 12, wherein the color filter and the first region overlap with each other.",
    "14. The display device according to claim 11, further comprising a transistor including the semiconductor film, wherein the second region has a stacked structure of the semiconductor film, the organic resin layer over the semiconductor film, the transparent conductive film and the metal film.",
    "15. The display device according to claim 11, wherein the transparent conductive film comprises at least one of indium tin oxide, indium tin silicon oxide, indium zinc oxide, a zinc oxide and a tin oxide, and wherein the metal film comprises at least one of Ti, Mo, Ta, Cr, W and Al.",
    "16. The display device according to claim 11, wherein the metal film has a stacked structure of a first layer and a second layer, wherein a side at an end of the first layer and a side at an end of the second layer are each inclined with respect to the first substrate, and wherein an inclined angle of the side at the end of the first layer and an inclined angle of the side at the end of the second layer are different from each other.",
    "17. The display device according to claim 11, wherein a side of the transparent conductive film is inclined with respect to the first substrate.",
    "18. An electronic device comprising: the display device according to claim 11; a speaker; a microphone; and a switch."
  ],
  "description_excerpt": "1. Field of the Invention\n\nThe present invention relates to a semiconductor device having a pixel electrode, especially a display device.\n\n2. Description of the Related Art\n\nIn manufacturing an active matrix display device, in general, a wiring to be connected to a semiconductor film of a thin film transistor (TFT) is formed and a conductive film to be a pixel electrode is formed over the wiring. Therefore, a resist mask for forming the wiring and a resist mask for forming the pixel electrode have been required.\n\nFurther, as another example, an example is given, in which a conductive film to be connected to a semiconductor film of a TFT is formed, the conductive film is made to serve also as a pixel electrode, and a metal film is formed over the conductive film (for example, Patent Document 1: Japanese Published Patent Application No. Hei6-230425). This example is different from the example described above. A transparent conductive film is employed as the conductive film, and the transparent conductive film is directly connected to the semiconductor film. The transparent conductive film is formed from a material having high resistance in many cases; therefore, in order to cover high electric resistance of the transparent conductive film, the metal film is formed over the transparent conductive film.\n\nAlso in Patent Document 1, in which the transparent conductive film is directly connected to the semiconductor film, a resist mask for forming a pixel electrode by etching the transparent conductive film and a resist mask for etching the metal film have been required.",
  "cpc": [
    "H10D 86/441",
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    "G02F 1/133512",
    "G02F 1/133514",
    "G02F 1/133707",
    "G02F 1/1341",
    "G02F 1/134309",
    "G02F 1/134336",
    "G02F 1/13439",
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  "ipc": [
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  "assignees": [
    "Semiconductor Energy Laboratory Co Ltd"
  ],
  "inventors": [
    "Hajime Kimura"
  ],
  "filing_date": "2014-11-07",
  "publication_date": "2017-09-26",
  "grant_date": "2017-09-26",
  "priority_date": "2005-10-14",
  "application_number": "US-201414535601-A",
  "family_id": "38018956",
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Record 3,871 of 8,000 in Patents full text (MLC-0201). Request the full dataset.