Residual gas analyser

{
  "id": "MLC-T-CHM-010224",
  "term": "Residual gas analyser",
  "field": "Chemistry",
  "definition": "A type of mass spectrometer designed to measure the partial pressures of gases present in a vacuum system. It ionizes gas molecules, separates them by their mass-to-charge ratio, and detects the resulting ions to identify and quantify the components of the residual atmosphere. These devices are commonly used for vacuum system diagnostics and process monitoring.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2013, 85, 1515. 'Definitions of terms relating to mass spectrometry (IUPAC Recommendations 2013)' on page 1585 (https://doi.org/10.1351/PAC-REC-06-04-06)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/residual-gas-analyser/"
}