Etch rate

{
  "id": "MLC-T-CHM-004115",
  "term": "Etch rate",
  "field": "Chemistry",
  "definition": "The speed at which material is removed from a substrate surface during an etching process. This rate is typically measured in units of nanometers per minute or angstroms per minute. It is influenced by factors such as etchant concentration, temperature, and the specific material being etched.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1874 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/etch-rate/"
}