Wet etching

{
  "id": "MLC-T-CHM-012683",
  "term": "Wet etching",
  "field": "Chemistry",
  "definition": "A subtractive manufacturing process in which a material is removed from a substrate by immersion in a liquid chemical solution. This technique is widely used in microfabrication to create patterns or structures on polymer films, often after exposure to radiation and development. The selectivity and rate of material removal depend on the etchant chemistry and the properties of the polymer.",
  "subject": "Polymer",
  "see_also": [
    "mask"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1874 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/wet-etching/"
}