Microfabrication

{
  "id": "MLC-T-CHM-013285",
  "term": "Microfabrication",
  "field": "Chemistry",
  "definition": "The process of creating structures and devices with dimensions in the micrometer range, often involving multiple steps of deposition, patterning, and etching. This field encompasses techniques such as photolithography, etching, and thin-film deposition. It is widely used in the production of microelectromechanical systems (MEMS) and integrated circuits.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1879 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/microfabrication/"
}