Dry deposition

{
  "id": "MLC-T-CHM-003458",
  "term": "Dry deposition",
  "field": "Chemistry",
  "definition": "A process in which a material is deposited onto a substrate from the vapor phase without the use of a liquid solvent. This technique is commonly employed in microfabrication for creating thin films of polymers or other materials. Examples include chemical vapor deposition (CVD) and physical vapor deposition (PVD).",
  "subject": "Polymer",
  "see_also": [
    "vapor deposition"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1873 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/dry-deposition/"
}