Etch

{
  "id": "MLC-T-CHM-004114",
  "term": "Etch",
  "field": "Chemistry",
  "definition": "To selectively remove material from a substrate surface, typically using chemical reagents or physical processes. This process creates patterns or features on the surface by dissolving or ablating exposed areas while protected regions remain intact. Etching is a fundamental step in microfabrication, including the production of integrated circuits.",
  "subject": "Polymer",
  "see_also": [
    "development",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1874 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/etch/"
}