Development
Term · Chemistry · MLC-T-CHM-003097
The process in photolithography where exposed or unexposed regions of a photoresist layer are selectively removed by a chemical solvent, known as a developer. This step translates the latent image formed by radiation exposure into a physical pattern on the substrate. The choice of developer and development conditions significantly impacts the final pattern quality.
| Identifier | MLC-T-CHM-003097 |
|---|---|
| Field | Chemistry |
| Subject | Polymer |
| References | PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1871 (https://doi.org/10.1515/pac-2018-1215) |
| See also | Image; Resist |
Record as JSON
{
"id": "MLC-T-CHM-003097",
"term": "Development",
"field": "Chemistry",
"definition": "The process in photolithography where exposed or unexposed regions of a photoresist layer are selectively removed by a chemical solvent, known as a developer. This step translates the latent image formed by radiation exposure into a physical pattern on the substrate. The choice of developer and development conditions significantly impacts the final pattern quality.",
"subject": "Polymer",
"see_also": [
"image",
"resist"
],
"references": [
"PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1871 (https://doi.org/10.1515/pac-2018-1215)"
],
"url": "https://mlchart.com/terminology/chemistry/development/"
}
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