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Development

Term · Chemistry · MLC-T-CHM-003097

The process in photolithography where exposed or unexposed regions of a photoresist layer are selectively removed by a chemical solvent, known as a developer. This step translates the latent image formed by radiation exposure into a physical pattern on the substrate. The choice of developer and development conditions significantly impacts the final pattern quality.

Table 1. Record
IdentifierMLC-T-CHM-003097
FieldChemistry
SubjectPolymer
ReferencesPAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1871 (https://doi.org/10.1515/pac-2018-1215)
See alsoImage; Resist
Record as JSON
{
  "id": "MLC-T-CHM-003097",
  "term": "Development",
  "field": "Chemistry",
  "definition": "The process in photolithography where exposed or unexposed regions of a photoresist layer are selectively removed by a chemical solvent, known as a developer. This step translates the latent image formed by radiation exposure into a physical pattern on the substrate. The choice of developer and development conditions significantly impacts the final pattern quality.",
  "subject": "Polymer",
  "see_also": [
    "image",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1871 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/development/"
}

Record 3,296 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.