Photoresist
Term · Chemistry · MLC-T-CHM-013402
A light-sensitive polymeric material used in photolithography to transfer a pattern from a photomask onto a substrate. Upon exposure to ultraviolet light, its solubility in a developer solution changes, allowing for selective removal of either the exposed or unexposed regions. This material is widely used in the fabrication of microelectronic devices.
| Identifier | MLC-T-CHM-013402 |
|---|---|
| Field | Chemistry |
| Subject | Organic and Biomolecular Chemistry |
| References | PAC, 1996, 68, 2223. 'Glossary of terms used in photochemistry (IUPAC Recommendations 1996)' on page 2265 (https://doi.org/10.1351/pac199668122223) |
| See also | Imaging; Solubility; Thin film |
Record as JSON
{
"id": "MLC-T-CHM-013402",
"term": "Photoresist",
"field": "Chemistry",
"definition": "A light-sensitive polymeric material used in photolithography to transfer a pattern from a photomask onto a substrate. Upon exposure to ultraviolet light, its solubility in a developer solution changes, allowing for selective removal of either the exposed or unexposed regions. This material is widely used in the fabrication of microelectronic devices.",
"subject": "Organic and Biomolecular Chemistry",
"see_also": [
"imaging",
"solubility",
"thin film"
],
"references": [
"PAC, 1996, 68, 2223. 'Glossary of terms used in photochemistry (IUPAC Recommendations 1996)' on page 2265 (https://doi.org/10.1351/pac199668122223)"
],
"url": "https://mlchart.com/terminology/chemistry/photoresist/"
}
Record 9,476 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.