Lithography

{
  "id": "MLC-T-CHM-006703",
  "term": "Lithography",
  "field": "Chemistry",
  "definition": "A patterning technique used to transfer a geometric design from a mask to a substrate, typically through a photosensitive material. This process involves exposing a resist layer to radiation, followed by development to create a relief pattern. It is a fundamental method in the fabrication of microelectronic devices and micro-electromechanical systems (MEMS).",
  "subject": "Polymer",
  "see_also": [
    "image"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1876 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/lithography/"
}