Microlithography

{
  "id": "MLC-T-CHM-007337",
  "term": "Microlithography",
  "field": "Chemistry",
  "definition": "A patterning technique used to create microscale features on a substrate by selectively exposing a photosensitive material (photoresist) to radiation. This process involves a mask to define the pattern and subsequent development to remove either the exposed or unexposed resist. Feature sizes in microlithography can be as small as tens of nanometers.",
  "subject": "Polymer",
  "see_also": [
    "lithography"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/microlithography/"
}