Pattern transfer

{
  "id": "MLC-T-CHM-008550",
  "term": "Pattern transfer",
  "field": "Chemistry",
  "definition": "The process in lithography of replicating a pattern from a resist layer into an underlying substrate material. After the resist is patterned by exposure and development, it acts as a mask during an etching or deposition step to modify the substrate. The fidelity of this transfer determines the final resolution and accuracy of the fabricated features on the substrate.",
  "subject": "Polymer",
  "see_also": [
    "etch",
    "image"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1882 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/pattern-transfer/"
}