Edge acuity

{
  "id": "MLC-T-CHM-003574",
  "term": "Edge acuity",
  "field": "Chemistry",
  "definition": "A measure of the sharpness or fidelity of the transition between exposed and unexposed regions in a patterned resist film. It quantifies how well the developed resist pattern reproduces the intended design, particularly at the boundaries of features. High edge acuity is indicated by a steep slope in the resist profile at the pattern boundary.",
  "synonyms": [
    "edge sharpness"
  ],
  "subject": "Polymer",
  "see_also": [
    "image"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1873 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/edge-acuity/"
}