MLchartDataset catalogue

Contrast

Term · Chemistry · MLC-T-CHM-002515

The steepness of a resist's response to exposure dose, showing how sharply it separates exposed from unexposed regions once developed. A high value means an abrupt change from soluble to insoluble material and so well-defined patterns. It equals the slope of the straight part of the curve of remaining resist thickness plotted against the logarithm of exposure dose, usually symbolised γ.

Table 1. Record
IdentifierMLC-T-CHM-002515
FieldChemistry
SubjectPolymer
Synonymscontrast ratio
ReferencesPAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1869 (https://doi.org/10.1515/pac-2018-1215)
See alsoContrast curve; Development; Resist
Record as JSON
{
  "id": "MLC-T-CHM-002515",
  "term": "Contrast",
  "field": "Chemistry",
  "definition": "The steepness of a resist's response to exposure dose, showing how sharply it separates exposed from unexposed regions once developed. A high value means an abrupt change from soluble to insoluble material and so well-defined patterns. It equals the slope of the straight part of the curve of remaining resist thickness plotted against the logarithm of exposure dose, usually symbolised γ.",
  "synonyms": [
    "contrast ratio"
  ],
  "subject": "Polymer",
  "see_also": [
    "contrast curve",
    "development",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1869 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/contrast/"
}

Record 2,677 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.