Contrast
Term · Chemistry · MLC-T-CHM-002515
The steepness of a resist's response to exposure dose, showing how sharply it separates exposed from unexposed regions once developed. A high value means an abrupt change from soluble to insoluble material and so well-defined patterns. It equals the slope of the straight part of the curve of remaining resist thickness plotted against the logarithm of exposure dose, usually symbolised γ.
| Identifier | MLC-T-CHM-002515 |
|---|---|
| Field | Chemistry |
| Subject | Polymer |
| Synonyms | contrast ratio |
| References | PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1869 (https://doi.org/10.1515/pac-2018-1215) |
| See also | Contrast curve; Development; Resist |
Record as JSON
{
"id": "MLC-T-CHM-002515",
"term": "Contrast",
"field": "Chemistry",
"definition": "The steepness of a resist's response to exposure dose, showing how sharply it separates exposed from unexposed regions once developed. A high value means an abrupt change from soluble to insoluble material and so well-defined patterns. It equals the slope of the straight part of the curve of remaining resist thickness plotted against the logarithm of exposure dose, usually symbolised γ.",
"synonyms": [
"contrast ratio"
],
"subject": "Polymer",
"see_also": [
"contrast curve",
"development",
"resist"
],
"references": [
"PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1869 (https://doi.org/10.1515/pac-2018-1215)"
],
"url": "https://mlchart.com/terminology/chemistry/contrast/"
}
Record 2,677 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.