Contrast curve

{
  "id": "MLC-T-CHM-002516",
  "term": "Contrast curve",
  "field": "Chemistry",
  "definition": "A graphical representation showing the normalized remaining resist thickness as a function of the logarithm of the exposure dose for a given resist and development process. This curve characterizes the sensitivity and contrast of a photoresist. The slope of the linear region of this curve provides the contrast value.",
  "subject": "Polymer",
  "see_also": [
    "development",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1870 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/contrast-curve/"
}