Swing curve

{
  "id": "MLC-T-CHM-011716",
  "term": "Swing curve",
  "field": "Chemistry",
  "definition": "A plot of a lithographic response, such as the dose needed to clear the resist or the printed linewidth, against resist thickness, in which the value oscillates sinusoidally. The oscillation comes from thin-film interference between light entering the resist and light reflected from the substrate. Successive maxima are spaced by half the wavelength of the exposing light in the resist.",
  "subject": "Polymer",
  "see_also": [
    "clearance dose",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1889 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/swing-curve/"
}