Dissolution promoter

{
  "id": "MLC-T-CHM-003329",
  "term": "Dissolution promoter",
  "field": "Chemistry",
  "definition": "A compound added to a photoresist formulation that increases the dissolution rate of the exposed or reacted resist material in a developer solution. This component enhances the contrast between exposed and unexposed regions, improving the resolution of the patterned features. It often works by making the polymer more soluble or by breaking down inhibiting interactions.",
  "subject": "Polymer",
  "see_also": [
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1872 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/dissolution-promoter/"
}