Dissolution inhibitor

{
  "id": "MLC-T-CHM-003328",
  "term": "Dissolution inhibitor",
  "field": "Chemistry",
  "definition": "A compound added to a polymer resist formulation that reduces the dissolution rate of the unexposed polymer film in a developer solution. In chemically amplified positive-tone photoresists, the inhibitor is converted into a dissolution-promoting substance upon exposure to radiation and subsequent heating, creating a solubility differential. Diazonaphthoquinone (DNQ) is a classic dissolution inhibitor used in g-line and i-line photoresists, where it undergoes a Wolff rearrangement to form a carboxylic acid.",
  "subject": "Polymer",
  "see_also": [
    "lithography",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1871 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/dissolution-inhibitor/"
}