Photoacid generator

{
  "id": "MLC-T-CHM-008789",
  "term": "Photoacid generator",
  "field": "Chemistry",
  "definition": "A compound that produces an acid upon exposure to ultraviolet (UV) or other high-energy radiation. These substances are key components in chemically amplified photoresists, where the generated acid catalyzes subsequent chemical reactions, such as deprotection of a polymer. Common examples include onium salts and sulfonium salts, which find extensive use in microlithography for semiconductor manufacturing.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1883 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/photoacid-generator/"
}