Dissolution rate

{
  "id": "MLC-T-CHM-003330",
  "term": "Dissolution rate",
  "field": "Chemistry",
  "definition": "The speed at which a solid material, such as a polymer photoresist, dissolves when exposed to a solvent or developer solution. This rate is influenced by factors such as the chemical composition of the material, its molecular weight, and the properties of the solvent. It is a key parameter in photolithography for controlling pattern development.",
  "subject": "Polymer",
  "see_also": [
    "development",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1872 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/dissolution-rate/"
}