Dark loss

{
  "id": "MLC-T-CHM-002859",
  "term": "Dark loss",
  "field": "Chemistry",
  "definition": "The reduction in the thickness of a photoresist film in areas that were not exposed to radiation during the lithographic process. This phenomenon occurs even without light exposure due to chemical reactions or dissolution during development. It is measured as the difference in film thickness before and after processing unexposed regions.",
  "subject": "Polymer",
  "see_also": [
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1870 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/dark-loss/"
}