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Adhesion promoter

Term · Chemistry · MLC-T-CHM-000247

A substance applied as a thin layer to a substrate to improve the bonding between the substrate and a subsequently applied polymer coating, such as a photoresist. It functions by modifying the surface chemistry of the substrate, making it more receptive to the polymer layer and preventing delamination during processing. Hexamethyldisilazane (HMDS) is a widely used adhesion promoter for silicon wafers in the microelectronics industry.

Table 1. Record
IdentifierMLC-T-CHM-000247
FieldChemistry
SubjectPolymer
ReferencesPAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1866 (https://doi.org/10.1515/pac-2018-1215)
Record as JSON
{
  "id": "MLC-T-CHM-000247",
  "term": "Adhesion promoter",
  "field": "Chemistry",
  "definition": "A substance applied as a thin layer to a substrate to improve the bonding between the substrate and a subsequently applied polymer coating, such as a photoresist. It functions by modifying the surface chemistry of the substrate, making it more receptive to the polymer layer and preventing delamination during processing. Hexamethyldisilazane (HMDS) is a widely used adhesion promoter for silicon wafers in the microelectronics industry.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1866 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/adhesion-promoter/"
}

Record 262 of 13,678 in Chemistry terminology (MLC-0109). Request the full dataset.