Adhesion promoter
Term · Chemistry · MLC-T-CHM-000247
A substance applied as a thin layer to a substrate to improve the bonding between the substrate and a subsequently applied polymer coating, such as a photoresist. It functions by modifying the surface chemistry of the substrate, making it more receptive to the polymer layer and preventing delamination during processing. Hexamethyldisilazane (HMDS) is a widely used adhesion promoter for silicon wafers in the microelectronics industry.
| Identifier | MLC-T-CHM-000247 |
|---|---|
| Field | Chemistry |
| Subject | Polymer |
| References | PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1866 (https://doi.org/10.1515/pac-2018-1215) |
Record as JSON
{
"id": "MLC-T-CHM-000247",
"term": "Adhesion promoter",
"field": "Chemistry",
"definition": "A substance applied as a thin layer to a substrate to improve the bonding between the substrate and a subsequently applied polymer coating, such as a photoresist. It functions by modifying the surface chemistry of the substrate, making it more receptive to the polymer layer and preventing delamination during processing. Hexamethyldisilazane (HMDS) is a widely used adhesion promoter for silicon wafers in the microelectronics industry.",
"subject": "Polymer",
"references": [
"PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1866 (https://doi.org/10.1515/pac-2018-1215)"
],
"url": "https://mlchart.com/terminology/chemistry/adhesion-promoter/"
}
Record 262 of 13,678 in Chemistry terminology (MLC-0109). Request the full dataset.