Planarising layer

{
  "id": "MLC-T-CHM-008999",
  "term": "Planarising layer",
  "field": "Chemistry",
  "definition": "A coating applied over a substrate with a non-flat surface topography to create a smooth, level surface for subsequent processing steps in lithography. This layer fills in depressions and covers protrusions, providing a uniform plane for the application of a photoresist or other functional layers. The effectiveness of the layer is measured by its degree of planarization, which quantifies the reduction in surface feature height after its application and curing.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1884 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/planarising-layer/"
}