Anti-reflective coating

{
  "id": "MLC-T-CHM-012877",
  "term": "Anti-reflective coating",
  "field": "Chemistry",
  "definition": "A thin layer of material applied to a substrate to reduce the reflection of light from its surface. This coating typically consists of one or more dielectric layers with specific refractive indices and thicknesses. In lithography, these coatings are applied to photoresists to minimize standing wave effects and reflections from the substrate, which can degrade pattern fidelity.",
  "subject": "Polymer",
  "see_also": [
    "lithography"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/anti-reflective-coating/"
}