Topcoat

{
  "id": "MLC-T-CHM-012106",
  "term": "Topcoat",
  "field": "Chemistry",
  "definition": "A thin, protective layer applied over a photoresist film in lithography to enhance imaging performance. This layer can prevent contamination, improve adhesion, or modify the optical properties of the resist stack. In immersion lithography, a topcoat often acts as a barrier to prevent resist components from leaching into the immersion fluid.",
  "subject": "Polymer",
  "see_also": [
    "immersion lithography",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1889 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/topcoat/"
}