Nanoimprint lithography

{
  "id": "MLC-T-CHM-007753",
  "term": "Nanoimprint lithography",
  "field": "Chemistry",
  "definition": "A method for creating nanoscale patterns by mechanically deforming a resist material with a hard mold or stamp. The process involves pressing the mold into a thin layer of resist, which is then cured by heat or ultraviolet light before the mold is removed, leaving its inverse pattern. This technique can achieve resolutions below 10 nanometers, surpassing the limits of some conventional optical lithography methods.",
  "subject": "Polymer",
  "see_also": [
    "imprint lithography"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1877 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/nanoimprint-lithography/"
}