Nanolithography

{
  "id": "MLC-T-CHM-007754",
  "term": "Nanolithography",
  "field": "Chemistry",
  "definition": "The fabrication of structures with at least one dimension in the nanometer scale, typically between 1 and 100 nanometers. It is a general term for a collection of techniques used to create these extremely small patterns on a substrate. Methods include electron-beam lithography, nanoimprint lithography, and scanning probe lithography.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/nanolithography/"
}