Scanning-probe lithography

{
  "id": "MLC-T-CHM-013523",
  "term": "Scanning-probe lithography",
  "field": "Chemistry",
  "definition": "A nanofabrication technique that uses a sharp probe tip, similar to those in atomic force microscopy, to create patterns on a substrate surface. The probe can induce chemical or physical changes at the nanoscale, such as local oxidation, deposition, or removal of material. This method offers high resolution patterning for creating polymer nanostructures.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/scanning-probe-lithography/"
}