Interference lithography

{
  "id": "MLC-T-CHM-005944",
  "term": "Interference lithography",
  "field": "Chemistry",
  "definition": "A patterning technique that uses the interference patterns of two or more coherent light beams to create periodic structures in a photosensitive polymer film. This method allows for the fabrication of high-resolution, large-area patterns without the need for a physical mask. It is widely used in the production of photonic crystals and gratings.",
  "synonyms": [
    "holographic lithography"
  ],
  "subject": "Polymer",
  "see_also": [
    "mask"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1877 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/interference-lithography/"
}