3D lithography
Term · Chemistry · MLC-T-CHM-000015
A set of fabrication techniques used to create three-dimensional structures with microscale or nanoscale resolution, typically by patterning a polymer resist. Unlike conventional planar lithography, these methods build structures layer-by-layer or by writing directly into the volume of a material. Techniques include multi-photon lithography, which uses focused laser light to polymerize a liquid resin at a specific point, and nanoimprint lithography for creating 3D topographies.
| Identifier | MLC-T-CHM-000015 |
|---|---|
| Field | Chemistry |
| Subject | Polymer |
| References | PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215) |
| See also | 2-photon lithography; Lithography; Nanoimprint lithography |
Record as JSON
{
"id": "MLC-T-CHM-000015",
"term": "3D lithography",
"field": "Chemistry",
"definition": "A set of fabrication techniques used to create three-dimensional structures with microscale or nanoscale resolution, typically by patterning a polymer resist. Unlike conventional planar lithography, these methods build structures layer-by-layer or by writing directly into the volume of a material. Techniques include multi-photon lithography, which uses focused laser light to polymerize a liquid resin at a specific point, and nanoimprint lithography for creating 3D topographies.",
"subject": "Polymer",
"see_also": [
"2-photon lithography",
"lithography",
"nanoimprint lithography"
],
"references": [
"PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)"
],
"url": "https://mlchart.com/terminology/chemistry/3d-lithography/"
}
Record 15 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.