MLchartDataset catalogue

3D lithography

Term · Chemistry · MLC-T-CHM-000015

A set of fabrication techniques used to create three-dimensional structures with microscale or nanoscale resolution, typically by patterning a polymer resist. Unlike conventional planar lithography, these methods build structures layer-by-layer or by writing directly into the volume of a material. Techniques include multi-photon lithography, which uses focused laser light to polymerize a liquid resin at a specific point, and nanoimprint lithography for creating 3D topographies.

Table 1. Record
IdentifierMLC-T-CHM-000015
FieldChemistry
SubjectPolymer
ReferencesPAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)
See also2-photon lithography; Lithography; Nanoimprint lithography
Record as JSON
{
  "id": "MLC-T-CHM-000015",
  "term": "3D lithography",
  "field": "Chemistry",
  "definition": "A set of fabrication techniques used to create three-dimensional structures with microscale or nanoscale resolution, typically by patterning a polymer resist. Unlike conventional planar lithography, these methods build structures layer-by-layer or by writing directly into the volume of a material. Techniques include multi-photon lithography, which uses focused laser light to polymerize a liquid resin at a specific point, and nanoimprint lithography for creating 3D topographies.",
  "subject": "Polymer",
  "see_also": [
    "2-photon lithography",
    "lithography",
    "nanoimprint lithography"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/3d-lithography/"
}

Record 15 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.