X-ray lithography

{
  "id": "MLC-T-CHM-012764",
  "term": "X-ray lithography",
  "field": "Chemistry",
  "definition": "A lithographic technique that uses X-rays to transfer a pattern from a mask to a radiation-sensitive polymer film, known as a resist. The short wavelength of X-rays allows for the creation of very fine features, enabling high-resolution patterning. This method is used in the fabrication of microelectronic devices and MEMS.",
  "subject": "Polymer",
  "see_also": [
    "lithography",
    "image",
    "mask",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/x-ray-lithography/"
}