Image
Term · Chemistry · MLC-T-CHM-005589
A pattern in a resist material created by a spatially selective chemical or physical change induced by exposure to radiation. This latent image is then made visible through a development process that selectively removes either the exposed (positive tone) or unexposed (negative tone) regions of the resist. The final physical relief pattern is a three-dimensional representation of the intended design, ready for subsequent etching or deposition steps.
| Identifier | MLC-T-CHM-005589 |
|---|---|
| Field | Chemistry |
| Subject | Polymer |
| References | PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1875 (https://doi.org/10.1515/pac-2018-1215) |
| See also | Development; Embossing |
Record as JSON
{
"id": "MLC-T-CHM-005589",
"term": "Image",
"field": "Chemistry",
"definition": "A pattern in a resist material created by a spatially selective chemical or physical change induced by exposure to radiation. This latent image is then made visible through a development process that selectively removes either the exposed (positive tone) or unexposed (negative tone) regions of the resist. The final physical relief pattern is a three-dimensional representation of the intended design, ready for subsequent etching or deposition steps.",
"subject": "Polymer",
"see_also": [
"development",
"embossing"
],
"references": [
"PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1875 (https://doi.org/10.1515/pac-2018-1215)"
],
"url": "https://mlchart.com/terminology/chemistry/image/"
}
Record 5,931 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.