Image blur

{
  "id": "MLC-T-CHM-005590",
  "term": "Image blur",
  "field": "Chemistry",
  "definition": "The broadening of a lithographic image that softens the sharpness of its edges, caused by scattering of the exposing radiation, diffusion of reactive species such as photoacid inside the resist, and development effects. It is measured as the distance between the positions where the exposure equals 12 percent and 88 percent of its maximum. Edge roughness is a separate measure of pattern quality.",
  "subject": "Polymer",
  "see_also": [
    "development",
    "image"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1875 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/image-blur/"
}