Aerial image

{
  "id": "MLC-T-CHM-000305",
  "term": "Aerial image",
  "field": "Chemistry",
  "definition": "The optical image formed by the projection system in a lithographic process, representing the pattern to be transferred onto a photosensitive material. This image exists in the air above the resist layer before it is recorded. The quality of the aerial image, including its contrast and resolution, directly impacts the fidelity of the patterned features on the substrate.",
  "subject": "Polymer",
  "see_also": [
    "image",
    "mask"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/aerial-image/"
}