Double patterning

{
  "id": "MLC-T-CHM-003407",
  "term": "Double patterning",
  "field": "Chemistry",
  "definition": "A lithographic technique that creates fine features by splitting a single design layer into two or more separate patterns. Each pattern is exposed and processed independently, then combined to form the final, high-resolution structure. This method extends the capabilities of existing lithography tools beyond their optical resolution limits.",
  "subject": "Polymer",
  "see_also": [
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1873 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/double-patterning/"
}