Nanosphere lithography

{
  "id": "MLC-T-CHM-007762",
  "term": "Nanosphere lithography",
  "field": "Chemistry",
  "definition": "A nanofabrication technique that employs a monolayer of close-packed nanospheres as a mask for patterning substrates. This method allows for the creation of periodic nanostructures over large areas. The size and arrangement of the resulting features are determined by the diameter of the nanospheres and the etching conditions.",
  "subject": "Polymer",
  "see_also": [
    "lithography"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/nanosphere-lithography/"
}