Imprint lithography

{
  "id": "MLC-T-CHM-005735",
  "term": "Imprint lithography",
  "field": "Chemistry",
  "definition": "A nanofabrication technique that creates patterns by mechanically deforming a resist layer with a mold. The mold, bearing the desired pattern, is pressed into a softened polymer resist, transferring its topography. This method is capable of producing features with dimensions down to a few nanometers.",
  "subject": "Polymer",
  "see_also": [
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1877 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/imprint-lithography/"
}