Nanopattern

{
  "id": "MLC-T-CHM-007757",
  "term": "Nanopattern",
  "field": "Chemistry",
  "definition": "A two-dimensional or three-dimensional arrangement of features where at least one dimension of the features is in the nanometer scale. These patterns are created on a substrate surface using nanolithography techniques. The smallest feature size within the pattern is often referred to as the critical dimension.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1881 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/nanopattern/"
}