Critical dimension

{
  "id": "MLC-T-CHM-002681",
  "term": "Critical dimension",
  "field": "Chemistry",
  "definition": "The smallest geometrical feature, such as the width of a line or the space between lines, that is printed in a photoresist layer during a lithographic process. This dimension represents the minimum feature size that can be reliably and reproducibly created on a substrate. The critical dimension (CD) is a key metric for the resolution of a lithographic system and is measured using techniques like scanning electron microscopy.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1870 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/critical-dimension/"
}