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Critical dimension

Term · Semiconductors · MLC-T-SEM-000073

A key geometric feature size on a semiconductor device, such as the width of a transistor gate or the spacing between metal lines, that significantly influences device performance. Maintaining precise control over the critical dimension during lithography and etching is paramount for achieving desired electrical characteristics and yield. This parameter is measured in nanometers and is a primary metric for technology node scaling.

Table 1. Record
IdentifierMLC-T-SEM-000073
FieldSemiconductors
SubjectFront-End Process
AbbreviationCD
Record as JSON 
{
  "id": "MLC-T-SEM-000073",
  "term": "Critical dimension",
  "field": "Semiconductors",
  "definition": "A key geometric feature size on a semiconductor device, such as the width of a transistor gate or the spacing between metal lines, that significantly influences device performance. Maintaining precise control over the critical dimension during lithography and etching is paramount for achieving desired electrical characteristics and yield. This parameter is measured in nanometers and is a primary metric for technology node scaling.",
  "abbreviation": "CD",
  "subject": "Front-End Process",
  "url": "https://mlchart.com/terminology/semiconductors/critical-dimension/"
}

Record 68 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.