MLchartDataset catalogue

Erosion

Term · Semiconductors · MLC-T-SEM-000120

The loss of dielectric thickness in a dense array of metal lines or trenches during chemical mechanical planarization, where overpolishing after the metal clears thins the oxide between the lines more than in open areas. It accompanies dishing as a topography error and is quoted in nanometers, measured against a nearby unpatterned field. Excess erosion also thins the metal lines themselves, raising their resistance.

Table 1. Record
IdentifierMLC-T-SEM-000120
FieldSemiconductors
SubjectDeposition, Etch & Clean
Record as JSON 
{
  "id": "MLC-T-SEM-000120",
  "term": "Erosion",
  "field": "Semiconductors",
  "definition": "The loss of dielectric thickness in a dense array of metal lines or trenches during chemical mechanical planarization, where overpolishing after the metal clears thins the oxide between the lines more than in open areas. It accompanies dishing as a topography error and is quoted in nanometers, measured against a nearby unpatterned field. Excess erosion also thins the metal lines themselves, raising their resistance.",
  "subject": "Deposition, Etch & Clean",
  "url": "https://mlchart.com/terminology/semiconductors/erosion/"
}

Record 117 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.