Exposure latitude

{
  "id": "MLC-T-CHM-004244",
  "term": "Exposure latitude",
  "field": "Chemistry",
  "definition": "The range of exposure doses over which a photoresist can be processed to yield a feature size that remains within specified critical dimension tolerances. It quantifies the robustness of a lithographic process against variations in exposure energy from the light source. Exposure latitude is expressed as a percentage of the nominal exposure dose required to achieve the target feature size.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1874 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/exposure-latitude/"
}